Analysis of high-power XeCl excimer laser

Wilhelmus J. Witteman; John C.M. Timmermans; Frederik A. van Goor

doi:10.1117/12.238508

22 April 1996 Analysis of high-power XeCl excimer laser

Wilhelmus J. Witteman, John C.M. Timmermans, Frederik A. van Goor

Proceedings Volume 2773, Laser Optics '95: Gas Lasers; (1996) https://doi.org/10.1117/12.238508
Event: Laser Optics '95, 1995, St. Petersburg, Russian Federation

Abstract

We consider the performance of high repetition rate XeCl excimer lasers by analyzing the constraints of the discharge parameters, the discharge technique, the shock wave formation and the scaling laws with respect to discharge dimensions and gas densities. It is shown that for high repetition rate the overshoot and charge mode are most suitable because of their lowest amount of fast switching energy that falls within the specifications of commercial long life thyratrons. Fast switching is not only required for better discharge quality but it also limits the heat dissipation of the saturable ferrite switches. An analysis is given of the shock wave development and its consequences on high repetition rate operation. It is found that the shock wave length relative to discharge width is independent on discharge volume. It depends only weakly on the discharge energy. The shock strength for a given discharge energy is inversely proportional to the initial gas density. Shock front disturbances will spread evenly as the shock propagates. For a homogeneous discharge they disappear roughly after a distance equal to the discharge width. With the present analysis scaling laws are derived which state that for optimized conditions the output power depends only on the blower capacity and on the square of the gas pressure.

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Wilhelmus J. Witteman, John C.M. Timmermans, and Frederik A. van Goor "Analysis of high-power XeCl excimer laser", Proc. SPIE 2773, Laser Optics '95: Gas Lasers, (22 April 1996); https://doi.org/10.1117/12.238508

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KEYWORDS

Capacitors

Electrodes

Excimer lasers

Gas lasers

Wave propagation

Fast packet switching

Inductance

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