Near-UV to IR optical characterization of YF3 thin films deposited by evaporation and ion beam processes

Etienne Quesnel; M. Berger; J. Cigna; David Duca; Catherine Pelle; F. Pierre

doi:10.1117/12.246824

19 August 1996 Near-UV to IR optical characterization of YF₃ thin films deposited by evaporation and ion beam processes

Etienne Quesnel, M. Berger, J. Cigna, David Duca, Catherine Pelle, F. Pierre

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246824
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

A comparative study of yttrium fluoride thin films deposited either by conventional e-beam evaporation or ion beam sputtering (IBS) processes was made. Each coating was systematically characterized in terms of chemical composition, density and optical properties in the near UV- visible and IR wavelength ranges. The evaporated films exhibited low densities whereas the IBS coatings were found to be rather dense. As a result, the IR optical properties of the IBS films were more stable without any large losses related to water peak absorption at (lambda) equals 2.9 and 6.1 micrometers. Moreover, the reactive deposition conditions drastically decreased the IR losses of sputtered films in the 10 to 12.5 micrometers wavelength range. The films analyzed by Rutherford backscattering spectroscopy and nuclear reaction analysis were found refractive indices and extinction coefficients were precisely measured using spectrophotometric and ellipsometric methods as well as a photothermal deflection technique. The strong variations of the optical properties from one sample to another were thus correlated to the evolution of the chemical properties of the films. Finally, this work shows that IBS processes used in appropriate operating conditions can lead to low absorbing YF₃ thin films usable for applications that require transparency over a very wide wavelength range, from 0.3 to 12.5 micrometers.

Citation Download Citation

Etienne Quesnel, M. Berger, J. Cigna, David Duca, Catherine Pelle, and F. Pierre "Near-UV to IR optical characterization of YF₃ thin films deposited by evaporation and ion beam processes", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246824

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available