Properties of transparent organic-inorganic composite coatings prepared by ion beam sputtering of PTFE and Al2O3

Melanie Gauch; Henrik Ehlers; Detlev Ristau

doi:10.1117/12.2191067

23 September 2015 Properties of transparent organic-inorganic composite coatings prepared by ion beam sputtering of PTFE and Al₂O₃

Melanie Gauch, Henrik Ehlers, Detlev Ristau

Author Affiliations +

Proceedings Volume 9627, Optical Systems Design 2015: Advances in Optical Thin Films V; 96270F (2015) https://doi.org/10.1117/12.2191067
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

Composite organic-inorganic coatings are realized by ion beam sputtering (IBS) from a zone target consisting of PTFE and Al₂O₃. The composition of the sputtered coatings is measured by Energy-Dispersive X-ray spectroscopy and the molecular structure is analyzed by Fourier Transform Infrared spectroscopy. The variation of the refractive index and the optical quality in dependence of the carbon-fluorine content for different material compositions is investigated. Furthermore, the intrinsic stress of the coatings is analyzed and a change from compressive to tensile stress in dependence of the composition is observed. The production of ion beam sputtered composite coatings with low refractive index and tensile stress is demonstrated.

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Melanie Gauch, Henrik Ehlers, and Detlev Ristau "Properties of transparent organic-inorganic composite coatings prepared by ion beam sputtering of PTFE and Al₂O₃", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96270F (23 September 2015); https://doi.org/10.1117/12.2191067

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