Computerized interferometric measurement of surface microstructure

James C. Wyant; Joanna Schmit

doi:10.1117/12.250754

18 September 1996 Computerized interferometric measurement of surface microstructure

James C. Wyant, Joanna Schmit

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250754
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

The addition of modern electronics, computers, and software to an interference microscope greatly increases the surface height measurement capability of the interference microscope. The RMS repeatability of surface microstructure measured using a computerized phase-shifting interference microscope can be less than 0.1 nanometer. While phase- shifting interferometry having sub-nanometer height precision has limited dynamic range, the dynamic range of an interference microscope can be extended to hundreds, or even thousands, of microns by using vertical scanning coherence peak sensing techniques. This paper describes the measurement capabilities of an interference microscope employing both phase-shifting phase measurement capability and coherence peak sensing. Typical measurements obtained using phase-shifting and coherence peak sensing are illustrated. Techniques for extending the measurement capability of computerized interference microscopes are discussed.

Citation Download Citation

James C. Wyant and Joanna Schmit "Computerized interferometric measurement of surface microstructure", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250754

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