Electromagnetic theory of multilayer gratings and zone plates

Michel Neviere; Frederic Montiel

doi:10.1117/12.245092

19 July 1996 Electromagnetic theory of multilayer gratings and zone plates

Michel Neviere, Frederic Montiel

Proceedings Volume 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III; (1996) https://doi.org/10.1117/12.245092
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

The two types of multilayer gratings used n x-ray domain, i.e. multilayer coated gratings and Bragg-Fresnel multilayer gratings are analyzed with the electromagnetic theory. The analysis starts from the differential formalism previously developed for a bare (single profile) grating. The method is generalized to an arbitrary thick modulated stratified medium thanks to the use of a suitable S-matrix propagation algorithm and gives stable and accurate numerical results. Thus, new diffracting devices which were out of reach of all existing theories can be analyzed, such as x-ray multilayer echelles. The method is then extended to study unperiodic focusing devices such as Bragg-Fresnel linear zone plates.

Citation Download Citation

Michel Neviere and Frederic Montiel "Electromagnetic theory of multilayer gratings and zone plates", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); https://doi.org/10.1117/12.245092

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