Paper
30 September 1996 Quality of optical thin films: integrated optics vs. optical coating
David T. Wei, Cheng-chung Lee, JinCherng Hsu
Author Affiliations +
Proceedings Volume 2891, Integrated Optoelectronics; (1996) https://doi.org/10.1117/12.253166
Event: Photonics China '96, 1996, Beijing, China
Abstract
The quality of optical thin films in integrated optics was more advanced than those in optical coatings in the mid- 1970s. However, quality of today's ion beam sputtered coatings is more advanced than the films in integrated optics. This reversal appears to be application driven. Due to the heavy demand of information highway, it is believed that better quality films in integrated optics will soon catch up again. Ample illustrations will be given.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David T. Wei, Cheng-chung Lee, and JinCherng Hsu "Quality of optical thin films: integrated optics vs. optical coating", Proc. SPIE 2891, Integrated Optoelectronics, (30 September 1996); https://doi.org/10.1117/12.253166
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KEYWORDS
Integrated optics

Mirrors

Ion beams

Optical coatings

Thin films

Sputter deposition

Ions

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