New processing approach for grafting optoelectronic devices and applications to multichip modules

Charles B. Morrison; Ronald L. Strijek; James H. Bechtel

doi:10.1117/12.271079

4 April 1997 New processing approach for grafting optoelectronic devices and applications to multichip modules

Charles B. Morrison, Ronald L. Strijek, James H. Bechtel

Proceedings Volume 3005, Optoelectronic Interconnects and Packaging IV; (1997) https://doi.org/10.1117/12.271079
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Epitaxial liftoff and grating of multiple thin integrated circuit-sized semiconductor films each containing over a hundred discrete devices confirms that multichip modules can be produced using this technology. the use of epitaxial liftoff membranes containing electronic and optoelectronic circuits and devices will provide (1) highly improved thermal management, (2) much higher density packaging, and (3) applications polylithically interconnecting electronic mixed-signal and optoelectronic devices. Bond strength data of thin epitaxial membranes grafted onto high thermal conductivity substrates quantifies for the first time to our knowledge the adhesion quality of van der Waals forces. In addition, the handling of very small discrete devices by means of integrated circuit-sized thin films permits the use of commercial off-the-shelf hardware in the development of an automated manufacturing assembly tool. This enabling technology will provide a manufacturing path to continue to commercialize new models of high performance optoelectronic modules with advanced features including higher data rates and increased function.

Citation Download Citation

Charles B. Morrison, Ronald L. Strijek, and James H. Bechtel "New processing approach for grafting optoelectronic devices and applications to multichip modules", Proc. SPIE 3005, Optoelectronic Interconnects and Packaging IV, (4 April 1997); https://doi.org/10.1117/12.271079

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available