Bidirectional ellipsometry and its application to the characterization of surfaces

Thomas A. Germer; Clara C. Asmail

doi:10.1117/12.278968

3 October 1997 Bidirectional ellipsometry and its application to the characterization of surfaces

Thomas A. Germer, Clara C. Asmail

Proceedings Volume 3121, Polarization: Measurement, Analysis, and Remote Sensing; (1997) https://doi.org/10.1117/12.278968
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The polarization of light scattered out of the pane of incidence was measured from rough and microrough silicon, polished fused silica and glass ceramic, and ground and polished black glass. The measurement defects, demonstrating that the polarization light can be used to distinguish between microroughness and subsurface defects.

Citation Download Citation

Thomas A. Germer and Clara C. Asmail "Bidirectional ellipsometry and its application to the characterization of surfaces", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); https://doi.org/10.1117/12.278968

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