Polarized light-scattering measurements of polished and etched steel surfaces

Thomas A. Germer; Thomas Rinder; Hendrik Rothe

doi:10.1117/12.401654

26 September 2000 Polarized light-scattering measurements of polished and etched steel surfaces

Thomas A. Germer, Thomas Rinder, Hendrik Rothe

Proceedings Volume 4100, Scattering and Surface Roughness III; (2000) https://doi.org/10.1117/12.401654
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The directional dependence of the intensity and polarization of light scattered by a series of steel surfaces was measured. The samples differ by polishing procedure. Theories for light scattering from microroughness and permittivity variations are reviews and used to interpret the results. It is shown that the experimental data can be fit to a combination of the two scattering mechanisms, whereby the relative amplitude of the two scattering sources and the complex degree of correlation are treated as adjustable parameters. The fits show at low degree of correlation at high spatial frequencies. This correlation has a characteristic phase, common for all of the samples. Comparison at the fitted roughness power spectral density (PSD) functions with those obtained by atomic force microscopy (AFM) showed reasonable but not perfect agreement. This study demonstrates how measurements of the polarization of scattered light can be used to quantify the scatter from two different scattering sources.

Citation Download Citation

Thomas A. Germer, Thomas Rinder, and Hendrik Rothe "Polarized light-scattering measurements of polished and etched steel surfaces", Proc. SPIE 4100, Scattering and Surface Roughness III, (26 September 2000); https://doi.org/10.1117/12.401654

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