SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Carole Craig Barron; Brady R. Davies; Jeffry J. Sniegowski; M. Steven Rodgers; John H. Comtois; M. Adrian Michalicek

doi:10.1117/12.284476

5 September 1997 SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Carole Craig Barron, Brady R. Davies, Jeffry J. Sniegowski, M. Steven Rodgers, John H. Comtois, M. Adrian Michalicek

Proceedings Volume 3223, Micromachining and Microfabrication Process Technology III; (1997) https://doi.org/10.1117/12.284476
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

The SAMPLE (Sandia Agile MEMS prototyping, layout tools, and education) service makes Sandia's state-of-the-art surface- micromachining technology, known as SUMMiT, available to U.S. industry for the first time. The Sandia ultra-planar multi- level MEMS technology (SUMMiT) offered through SAMPLE is the world's most advanced surface-micromachining technology, with three independently patternable ultra-low-stress mechanical polysilicon levels (in addition to the electrical polysilicon layer), one-micron design rules, flanged hubs, and CMP planarization of the third sacrificial oxide to provide planar structures in the third mechanical polysilicon layer (MMPoly3). Participants in the SAMPLE program learn about MEMS and SUMMiT process through the Sandia MEMS short course and then use Sandia's specialized design and layout tools to design their own micromachines to be fabricated in SUMMiT.

Citation Download Citation

Carole Craig Barron, Brady R. Davies, Jeffry J. Sniegowski, M. Steven Rodgers, John H. Comtois, and M. Adrian Michalicek "SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)", Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); https://doi.org/10.1117/12.284476

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