Fabrication and performance of diffractive optics for quantum well infrared photodetectors

Frederick S. Pool; Daniel W. Wilson; Paul D. Maker; Richard E. Muller; John J. Gill; Deepak K. Sengupta; John K. Liu; Sumith V. Bandara; Sarath D. Gunapala

doi:10.1117/12.317608

22 July 1998 Fabrication and performance of diffractive optics for quantum well infrared photodetectors

Frederick S. Pool, Daniel W. Wilson, Paul D. Maker, Richard E. Muller, John J. Gill, Deepak K. Sengupta, John K. Liu, Sumith V. Bandara, Sarath D. Gunapala

Author Affiliations +

Proceedings Volume 3379, Infrared Detectors and Focal Plane Arrays V; (1998) https://doi.org/10.1117/12.317608
Event: Aerospace/Defense Sensing and Controls, 1998, Orlando, FL, United States

Abstract

Diffractive optical elements (microlenses) for quantum well infrared photodetectors (QWIPs) were fabricated by two techniques: (1) standard lithography of a binary optical structure and (2) PMMA pattern transfer for an analog diffractive optic structure. The binary lenses were fabricated by sequential contact lithography and etching using two binary masks. The analog diffractive lenses were fabricated in PMMA by direct-write e-beam lithography followed by acetone development. The resulting PMMA surface relief profile was transferred into the GaAs by dry etching. Both types of lenses were etching into GaAs using an electron cyclotron resonance (ECR) microwave plasma etching system. Although the lenses were fabricated accurately, the performance of the QWIPs was not improved as much as expected due to the angle-of-incidence sensitivity of the QWIP light-coupling grating. The lenses would have likely improved the performance of detectors capable of absorbing normally incident light.

Citation Download Citation

Frederick S. Pool, Daniel W. Wilson, Paul D. Maker, Richard E. Muller, John J. Gill, Deepak K. Sengupta, John K. Liu, Sumith V. Bandara, and Sarath D. Gunapala "Fabrication and performance of diffractive optics for quantum well infrared photodetectors", Proc. SPIE 3379, Infrared Detectors and Focal Plane Arrays V, (22 July 1998); https://doi.org/10.1117/12.317608

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available