Precise automatic alignment of a pinhole integrated with photodiodes

Minoru Sasaki; Yuji Arai; Wataru Kamada; Kazuhiro Hane

doi:10.1117/12.311035

22 June 1998 Precise automatic alignment of a pinhole integrated with photodiodes

Minoru Sasaki, Yuji Arai, Wataru Kamada, Kazuhiro Hane

Proceedings Volume 3419, Optoelectronic Materials and Devices; 34191D (1998) https://doi.org/10.1117/12.311035
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 micrometers using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.

Citation Download Citation

Minoru Sasaki, Yuji Arai, Wataru Kamada, and Kazuhiro Hane "Precise automatic alignment of a pinhole integrated with photodiodes", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34191D (22 June 1998); https://doi.org/10.1117/12.311035

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