Design of a LIGA beamline using a multilayer-coated reflection mirror

Hiroo Kinoshita; Yachiyo Kimpara; T. Uruga; Takeo Watanabe; Masahito Niibe; Yuriy Ya. Platonov; James L. Wood

doi:10.1117/12.331117

13 November 1998 Design of a LIGA beamline using a multilayer-coated reflection mirror

Hiroo Kinoshita, Yachiyo Kimpara, T. Uruga, Takeo Watanabe, Masahito Niibe, Yuriy Ya. Platonov, James L. Wood

Proceedings Volume 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications; (1998) https://doi.org/10.1117/12.331117
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper describes the beamline optics for deep-etch x-ray lithography. In order to obtain a higher reflectivity than that provided by a mirror with a monolayer coating at photon energies of 4 to 6 keV, multilayer mirrors with a constant and graded d-spacing were developed. At an energy of 6 keV, a measured reflectivity of more than 80 percent and a bandwidth of 1 keV were obtained for a mirror with a Ni/C multilayer coating and a constant d-spacing. Moreover, it was found that, for energies form 4 to 6 keV, a multilayer mirror with a graded d-spacing provided a higher reflectivity and a wider bandwidth than a mirror with a Pt monolayer coating. A multilayer reflection mirror is a promising component of beamline optics for use in microfabrication and the structural analysis of materials.

Citation Download Citation

Hiroo Kinoshita, Yachiyo Kimpara, T. Uruga, Takeo Watanabe, Masahito Niibe, Yuriy Ya. Platonov, and James L. Wood "Design of a LIGA beamline using a multilayer-coated reflection mirror", Proc. SPIE 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications, (13 November 1998); https://doi.org/10.1117/12.331117

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available