Micropump for viscous liquids and muds

Norbert Schwesinger; Sasha Bechtel

doi:10.1117/12.322080

10 September 1998 Micropump for viscous liquids and muds

Norbert Schwesinger, Sasha Bechtel

Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322080
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

This work was focused on the development of a micropump that allows the transport of fluids with high viscosities or fluids containing pigments in a large amount. This new pump should be produced by means of silicon micromachining technologies. Due to adhesion forces as well as sedimentation processes the transport of highly viscous and particle loaded fluids is a difficult problem. Dead volumes must be surely avoided in the pump because they are preferred regions of adhesion and sedimentation, respectively. The developed micropump is nearly free of dead volumes. It consists of silicon chips and a PTFE-membrane bonded together without real gluing procedures. The silicon chips contain deep etched structures manufactured by simple wet chemical etching procedures. Pressure on the liquid can be generated inside the structures by pushing the elastic membrane. A pneumatic drive was used to deflect the membranes. In a peristaltic mode it was possible to pump liquids like honey or mustard with a noticeable flow rat up to 0.6 ml/min without any back flow.

Citation Download Citation

Norbert Schwesinger and Sasha Bechtel "Micropump for viscous liquids and muds", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); https://doi.org/10.1117/12.322080

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