Two-frequency phase-shifting projection moire topography

Seung-Woo Kim; Jung-Taek Oh; Moon-Sik Jung; Yi-Bae Choi

doi:10.1117/12.334348

29 December 1998 Two-frequency phase-shifting projection moire topography

Seung-Woo Kim, Jung-Taek Oh, Moon-Sik Jung, Yi-Bae Choi

Proceedings Volume 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV; (1998) https://doi.org/10.1117/12.334348
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

Adopting phase-shifting technique in moire topography provides many advantages in measuring complex surface profiles with varying reflectance. However, still the so- called 2(pi) -ambiguity problem remains, which limits the maximum measurable step height difference between two neighboring sample points to be less than half the equivalent wavelength of moire fringes. To cope with the problem in this investigation, a two-wavelength scheme of projection moire topography is proposed along with necessary hardware design considerations. Test results prove that the proposed scheme is capable of finding absolute fringe orders automatically, so that the 2(pi) -ambiguity problem can be effectively overcome so as to treat large step discontinuities in measured surfaces.

Citation Download Citation

Seung-Woo Kim, Jung-Taek Oh, Moon-Sik Jung, and Yi-Bae Choi "Two-frequency phase-shifting projection moire topography", Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); https://doi.org/10.1117/12.334348

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available