Current status of radiation resistance of dielectric mirrors in the DUV

Helmut Bernitzki; Hans Lauth; Roland Thielsch; Holger Blaschke; Norbert Kaiser; Klaus R. Mann

doi:10.1117/12.344386

7 April 1999 Current status of radiation resistance of dielectric mirrors in the DUV

Helmut Bernitzki, Hans Lauth, Roland Thielsch, Holger Blaschke, Norbert Kaiser, Klaus R. Mann

Proceedings Volume 3578, Laser-Induced Damage in Optical Materials: 1998; (1999) https://doi.org/10.1117/12.344386
Event: Laser-Induced Damage in Optical Materials: 1998, 1998, Boulder, CO, United States

Abstract

Dielectric mirrors are key optical components in ArF excimer laser based devices for applications in DUV photolithography as well as in material processing. In all these applications different requirements of laser radiation resistance have to be met in relation to fluence, repetition rate and pulse number lifetime. Investigations have been performed into the radiation resistance of dielectric mirrors consisting of fluorides and oxides with emphasis to the properties of bending point mirrors used in beam delivery systems of wafer steppers. Problems and limitations for the improvements of the laser-induced-damage-thresholds of the coatings are discussed.

Citation Download Citation

Helmut Bernitzki, Hans Lauth, Roland Thielsch, Holger Blaschke, Norbert Kaiser, and Klaus R. Mann "Current status of radiation resistance of dielectric mirrors in the DUV", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); https://doi.org/10.1117/12.344386

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