Advanced-laser processing of photonic and microelectronic components at Photonics Research Ontario

Peter R. Herman; Gregory Goodno; Xijia Gu; Jeff B. Kalbfleisch; John Long; Marc Lukacs; Robin S. Marjoribanks; R. J. Dwayne Miller; Marc Nantel; Sola Ness; Anton Oettl

doi:10.1117/12.352687

15 July 1999 Advanced-laser processing of photonic and microelectronic components at Photonics Research Ontario

Peter R. Herman, Gregory Goodno, Xijia Gu, Jeff B. Kalbfleisch, John Long, Marc Lukacs, Robin S. Marjoribanks, R. J. Dwayne Miller, Marc Nantel, Sola Ness, Anton Oettl

Author Affiliations +

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352687
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Photonics Research Ontario (PRO) is an Ontario Provincial Center of Excellence supporting a broad range of laser- processing activities within its photonics program. These activities are centered at the University of Toronto, and split between an industrial-user facility and the individual research programs of principal investors. The combined effort furnishes forefront laser system and advanced optical tools to explore novel processing applications in photonic, biomedical, and microelectronic areas. Facilities include laser micromachining stations, excimer-based mask-projection stations, extremely short wavelength lasers such as the molecular fluorine laser, and ultrafast laser systems. The latter two advanced laser offer interesting advantages and contrast in processing 'difficult' materials through linear and nonlinear absorption processes, respectively. These laser systems provide fine precision and strong interaction with a wide range of materials, including 'transparent' glasses, and also ceramics and metals. Applications fall broadly into several areas: wafer-level circuit trimming, high-resolution ultrasonic transducers, and the shaping of optical waveguides and Bragg-gratings for photonic components. This paper summarizes the laser-processing infrastructure and research activities at PRO.

Citation Download Citation

Peter R. Herman, Gregory Goodno, Xijia Gu, Jeff B. Kalbfleisch, John Long, Marc Lukacs, Robin S. Marjoribanks, R. J. Dwayne Miller, Marc Nantel, Sola Ness, and Anton Oettl "Advanced-laser processing of photonic and microelectronic components at Photonics Research Ontario", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352687

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available