White light phase-shifting interferometry with self-compensation of PZT scanning errors

Seung-Woo Kim; MinGu Kang; SangYoon Lee

doi:10.1117/12.347782

7 May 1999 White light phase-shifting interferometry with self-compensation of PZT scanning errors

Seung-Woo Kim, MinGu Kang, SangYoon Lee

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347782
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

One of main error sources in scanning white light interferometry is the inaccuracy of scanning mechanisms for which PZT piezoelectric ceramics actuators are widely used. In this paper, we propose a new calibration method being capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. Experimental results prove that the method provides an effective means of in-situ self-calibration enhancing the measurement uncertainty by one order of magnitude.

Citation Download Citation

Seung-Woo Kim, MinGu Kang, and SangYoon Lee "White light phase-shifting interferometry with self-compensation of PZT scanning errors", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347782

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