Combined deformation and shape measurement with ESPI

David I. Farrant; Jon N. Petzing; John Raymond Tyrer; Bozenko F. Oreb

doi:10.1117/12.357749

13 August 1999 Combined deformation and shape measurement with ESPI

David I. Farrant, Jon N. Petzing, John Raymond Tyrer, Bozenko F. Oreb

Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357749
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

Conventional models of ESPI deformation measurement are valid only for planar objects, and then only in the paraxial region. If an object is non-planar, then accurate deformation values can only be recovered if the surface shape is also known. This is because the local sensitivity vectors of deformation are a function of both the illumination and observation directions, which vary with the 3D position of the object points. We present a compact ESPI system for measurement of both shape and deformation using a mutual optical configuration. We also introduce an efficient method of data analysis. The system is demonstrated on a vibrating cylinder, where the shape information is used to derive the true out-of-plane deformation on the cylinder surface.

Citation Download Citation

David I. Farrant, Jon N. Petzing, John Raymond Tyrer, and Bozenko F. Oreb "Combined deformation and shape measurement with ESPI", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); https://doi.org/10.1117/12.357749

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