Two-wavelength interferometry combined with N-point technique

Joanna Schmidt

doi:10.1117/12.357713

13 August 1999 Two-wavelength interferometry combined with N-point technique

Joanna Schmidt

Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357713
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

Combining two-wavelength interferometry with the N-point technique (also called spatial carrier phase shifting interferometry) allows for the measurement of objects with large step heights that single-wavelength, phase-shifting interferometry can not correctly resolve. This combination yields some significant advantages but entails some limitations as well. Advantages include the elimination of the need for a phase shifter and the fast measurement of large step heights. The major limitations is a decrease in the measurable slope range of the object. Other concerns include setting the correct carrier frequency of the fringes for both wavelengths and coping with the magnification of the inherent phase errors of the N-point technique. The presentation considers real as well as simulated objects.

Citation Download Citation

Joanna Schmidt "Two-wavelength interferometry combined with N-point technique", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); https://doi.org/10.1117/12.357713

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