Optical surface profilometry in China

Deyan Xu; Weixing Shen

doi:10.1117/12.366694

25 October 1999 Optical surface profilometry in China

Deyan Xu, Weixing Shen

Proceedings Volume 3784, Rough Surface Scattering and Contamination; (1999) https://doi.org/10.1117/12.366694
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This article describes briefly the optical surface profileometry in China, including several result of its theory research, optical profiler development and some problems using the optical profiler.

Citation Download Citation

Deyan Xu and Weixing Shen "Optical surface profilometry in China", Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); https://doi.org/10.1117/12.366694

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available