Characterization of laser-produced gas-puff plasmas for soft x-ray projection lithography

Masayuki Suzuki; Hiroyuki Daido; Il Woo Choi; Huajing Tang; Susumu Yamagami; Hideo Nagatomo; Andrzej Bartnik; Henryk Fiedorowicz; Wei Yu; Takeyoshi Nakayama

doi:10.1117/12.375161

11 January 2000 Characterization of laser-produced gas-puff plasmas for soft x-ray projection lithography

Masayuki Suzuki, Hiroyuki Daido, Il Woo Choi, Huajing Tang, Susumu Yamagami, Hideo Nagatomo, Andrzej Bartnik, Henryk Fiedorowicz, Wei Yu, Takeyoshi Nakayama

Author Affiliations +

Proceedings Volume 3886, High-Power Lasers in Energy Engineering; (2000) https://doi.org/10.1117/12.375161
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

We characterize a laser produced gas puff plasma for soft x- ray generation. Strong emissions at 11.4 nm wavelength region was observed, using krypton and xenon gas puff targets irradiated by a 0.7J/8ns Nd:YAG laser. Space resolved x-ray spectra measurement indicated that the source size depends on the Rayleigh length and the gas density profile. A channeling effect for larger tare size which is connected with the thermal focusing has been observed.

Citation Download Citation

Masayuki Suzuki, Hiroyuki Daido, Il Woo Choi, Huajing Tang, Susumu Yamagami, Hideo Nagatomo, Andrzej Bartnik, Henryk Fiedorowicz, Wei Yu, and Takeyoshi Nakayama "Characterization of laser-produced gas-puff plasmas for soft x-ray projection lithography", Proc. SPIE 3886, High-Power Lasers in Energy Engineering, (11 January 2000); https://doi.org/10.1117/12.375161

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available