Pulsed-laser deposition of hydrogenated amorphous carbon films from a polymeric target

Sumei Huang; Yongfeng Lu; Zhuo Sun

doi:10.1117/12.387587

7 June 2000 Pulsed-laser deposition of hydrogenated amorphous carbon films from a polymeric target

Sumei Huang, Yongfeng Lu, Zhuo Sun

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387587
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

The phenylcarbyne polymer possesses a diamond-like structure. Because of its special structure, this polymer can be converted into diamond-like carbon phases at atmospheric pressure by thennal decomposition. In this article, we report on the growth of hydrogenated amoiphous carbon films (a-C:H) films by pulsed laser (KrF excimer, λ =248 mn) ablation of a phenylcarbyne polymer target under vacuum. a-C:H films were deposited with various laser fluences and at different substrate temperatures. Chemical and siructural characteristics of these films were analysed using X-ray-excited Auger electron spectroscopy (XAES), photoelectron loss spectroscopy (PELS), and Ranian speciroscopy. It was found that the fourfold-coordinated component increases with laser fluence at 80°C or increases with temperature increasing from 25°C to 60°C at a fluence of 1 x 1O⁹cm². When the deposition temperature is increased from 60°C to 200°C at a fluence of 1 x 10⁹ W/cm², the graphitic component increases. The variation in chemical structures of these films is explained in terms of the changes in the fraction of sp²-bonded clusters and changes in the termination of the gmphitic clusters and sp³-bonded networks by hydrogen in the a-C:H films.

Citation Download Citation

Sumei Huang, Yongfeng Lu, and Zhuo Sun "Pulsed-laser deposition of hydrogenated amorphous carbon films from a polymeric target", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387587

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