Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs

Hubert Jerominek; Timothy D. Pope; Christine Alain; Rose Zhang; Francis Picard; Mario Lehoux; Felix Cayer; Simon Savard; Carl Larouche; Carol Grenier

doi:10.1117/12.391766

17 July 2000 Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs

Hubert Jerominek, Timothy D. Pope, Christine Alain, Rose Zhang, Francis Picard, Mario Lehoux, Felix Cayer, Simon Savard, Carl Larouche, Carol Grenier

Author Affiliations +

Proceedings Volume 4028, Infrared Detectors and Focal Plane Arrays VI; (2000) https://doi.org/10.1117/12.391766
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

Prototypes of VO₂-based bolometric detectors with lateral dimensions of 25 X 25, 30 X 30, 35 X 35, 40 X 40 and finally 50 X 50 micrometers² and fill factors approaching 90% are presented. These detectors are grouped in hardwired linear arrays as large as 512 X 1 pixels. Under DC biasing, the fabricated detectors, even the smallest ones, exhibit responsivities from 48,000 to 120,000 VW^-1, detectivities in the range of 1.5 X 10⁸ cm Hz^1/2W^-1 and response times in the range of 5 ms. These new bolometric detector structures contain hidden-legs placed completely underneath the bolometer platform. Results of simulations of the mechanical, optical and electrical properties of these new detector structures are presented. A complete detector fabrication process flow is described.

Citation Download Citation

Hubert Jerominek, Timothy D. Pope, Christine Alain, Rose Zhang, Francis Picard, Mario Lehoux, Felix Cayer, Simon Savard, Carl Larouche, and Carol Grenier "Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391766

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available