Fabrication of multielement arrays based on high-Tc superconducting microbolometers

Xintian Liu; Z. H. Liu; Yong Chang; Junhao Chu

doi:10.1117/12.408315

29 November 2000 Fabrication of multielement arrays based on high-T_c superconducting microbolometers

Xintian Liu, Z. H. Liu, Yong Chang, Junhao Chu

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408315
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D* for various bolometric elements are ranged from 1.2 X 10⁸ to 7.2 X 10⁸ cmHz^1/2w^-1 at the operating temperature approximately 88 K.

Citation Download Citation

Xintian Liu, Z. H. Liu, Yong Chang, and Junhao Chu "Fabrication of multielement arrays based on high-T_c superconducting microbolometers", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408315

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