Advanced laser microfabrication of photonic components

Peter R. Herman; Kevin P. Chen; Paul B. Corkum; Andrei Naumov; Sandy Ng; Jie Zhang

doi:10.1117/12.405727

6 November 2000 Advanced laser microfabrication of photonic components

Peter R. Herman, Kevin P. Chen, Paul B. Corkum, Andrei Naumov, Sandy Ng, Jie Zhang

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405727
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

The powerful transition from electronic to photonic systems in today's Internet-driven communication industry is driving the development of processes to miniaturize and integrate optical components. New processing and packaging technologies are now required that can precisely shape and assemble transparent optical components to sub-wavelength accuracy. Laser microfabrication technology is beginning to play a role here. Our groups are exploring two extremes in laser technology- ultrafast lasers and very short wavelength F₂ lasers- to microstructure optical surfaces and to profile refractive-index structures inside transparent glasses. In this paper, we compare photosensitivity responses, spatial resolution, and processing windows for the deep-ultraviolet and ultrafast laser approaches, and discuss prospects for laser printing and trimming of optical waveguide components and circuits.

Citation Download Citation

Peter R. Herman, Kevin P. Chen, Paul B. Corkum, Andrei Naumov, Sandy Ng, and Jie Zhang "Advanced laser microfabrication of photonic components", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405727

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available