Polymer microlens arrays fabricated using the hydrophobic effect

Daniel M. Hartmann; Osman Kibar; Sadik C. Esener

doi:10.1117/12.386869

24 May 2000 Polymer microlens arrays fabricated using the hydrophobic effect

Daniel M. Hartmann, Osman Kibar, Sadik C. Esener

Proceedings Volume 4089, Optics in Computing 2000; (2000) https://doi.org/10.1117/12.386869
Event: 2000 International Topical Meeting on Optics in Computing (OC2000), 2000, Quebec City, Canada

Abstract

We report a means of fabricating hydrophilic domains in a hydrophobic background by lithographically patterning an adhesive hydrophobic layer. Organic polymer microlenses have been fabricated on these substrates using a dip-coating technique. Various lens shapes (circular, elliptical, square) have been fabricated on a variety of substrates (SiO₂, SiN, GaAs, InP, etc), ranging in size from 2 - 500 micrometers in diameter, and having fill factors of up to 90%. Plano-convex and double-convex lenses have been fabricated as fast as f/1.38 and f/1.2, respectively. The performance of arrays of these microlenses was quantitatively analyzed and optimized.

Citation Download Citation

Daniel M. Hartmann, Osman Kibar, and Sadik C. Esener "Polymer microlens arrays fabricated using the hydrophobic effect", Proc. SPIE 4089, Optics in Computing 2000, (24 May 2000); https://doi.org/10.1117/12.386869

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