Paper
26 October 2000 Applications of phase-retrieval x-ray diffractometry (PRXRD) to advanced characterization of materials used in photonic space systems
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Abstract
A highly advanced experimental-analytical x-ray diffraction technique for the unique determination of material structure is discussed with respect to its possible application for the characterization of materials used in photonic space devices. The PRXRD technique allows one to determine, in great detail--at the level of a few angstrom, the physical dimensions and fine structure of crystalline materials. During the recent years the technique has been used successfully to determine the defects and fine structure of 1- and 2-D crystal-lattice strain distributions in SiGe- and GaAs-based heterostructures and in silicon crystals implanted with high-energy ions. There are materials that presently used in design of semiconductor lasers, detectors and ultra-high frequency telecommunication devices suitable for space applications. Recent atomic spatial resolution studies have allowed, for the first time, observation and preliminary analysis of surface and interface nano-scale sub-layers, where the crystal structure-factor may noticeably differ from the bulk material.
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Andrei Yurievich Nikulin "Applications of phase-retrieval x-ray diffractometry (PRXRD) to advanced characterization of materials used in photonic space systems", Proc. SPIE 4134, Photonics for Space Environments VII, (26 October 2000); https://doi.org/10.1117/12.405353
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KEYWORDS
Crystals

Diffraction

X-rays

Scattering

X-ray diffraction

Photomasks

Interfaces

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