Paper
6 October 2000 Choice of modulation parameters in photothermal-modulation laser diode interferometer
Xianzhao Wang, Hongbin Lu, Xuefeng Wang, Danyang Yu, Feng Qian, Gaoting Chen, Zujie Fang
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402835
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
Abstract
In the laser diode interferometer with a photothermal wavelength modulation which is used for optical fine measurement, intensity fluctuations of light source cause measurement errors through the fluctuations decrease greatly as compared with the injection current modulation of wavelength. In this paper, we investigated the effect of photothermal modulation parameters of wavelength on the intensity fluctuations of light source. Choosing appropriate photothermal-modulation parameters, we measured microdisplacements of object with a high measurement accuracy.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xianzhao Wang, Hongbin Lu, Xuefeng Wang, Danyang Yu, Feng Qian, Gaoting Chen, and Zujie Fang "Choice of modulation parameters in photothermal-modulation laser diode interferometer", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402835
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KEYWORDS
Modulation

Interferometers

Light sources

Semiconductor lasers

Optical testing

Temperature metrology

Light

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