The ferroelectric Pb1-xLax(ZryTiz)(1- x/4)O3 (PLZT) (x equals 0.09, y equals 0.65, z equals 0.35) optical waveguiding thin films have been prepared on fused silica, (001) quartz, (0001) sapphire and CeO2 coated (11 02) sapphire substrates by pulsed laser deposition. X-ray 20 scans showed that the films are amorphous, highly pyrochlore <110> and highly <110> pseudocubic perovskite textured. The chemical composition of the films was determined by WDX and the influence of oxygen partial pressure on the lead content was observed. The optical waveguiding properties of the films were characterized using a rutile prism coupling method. The distinct m-lines of the guided TE and TM modes of the films have been observed. The refractive index measured by m-line technique reached value about 2.2 at 633 nm wavelength, which is close to the PLZT bulk value. The films have transmittance of about 70% at the wavelength 400 nm.
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