Comparison of the structural characteristics and surface morphology of ZnO thin films grown on various substrates by pulsed laser deposition

J. H. Kim; Kyoung-cheol Lee; Cheon Lee

doi:10.1117/12.541058

18 November 2003 Comparison of the structural characteristics and surface morphology of ZnO thin films grown on various substrates by pulsed laser deposition

J. H. Kim, Kyoung-cheol Lee, Cheon Lee

Author Affiliations +

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.541058
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

ZnO thin films on (100) p-type Si and sapphire substrates have been deposited by pulsed laser deposition technique using Nd:YAG laser with a wavelength of 266 nm. The influence of the deposition parameters such as oxygen pressure, substrate temperature and laser energy density on the properties of the grown films, was studied. The experiments were performed for substrates temperature in the range of 200 - 500°C and oxygen pressure in the range of 100 to approximately 700 sccm. All the films grown in this experiment show strong c-axis orientation with (002) textured ZnO peak. With increasing substrate temperature, the full width at half maximum (FWHM) and surface roughness were descreased. In case of sapphire substrate, the intensity of PL spectra increased with increasing ambient oxygen flow rate. We investigated in the structural and morphological properties of ZnO thin films using X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM).

Citation Download Citation

J. H. Kim, Kyoung-cheol Lee, and Cheon Lee "Comparison of the structural characteristics and surface morphology of ZnO thin films grown on various substrates by pulsed laser deposition", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.541058

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