Microfabricated ZnSe diffractive optical elements for CO2 laser

Keiji Ebata; Keiji Fuse; Kenichi Kurisu; Takeshi Okada; Takayuki Hirai; Hirokuni Nanba

doi:10.1117/12.445598

23 October 2001 Microfabricated ZnSe diffractive optical elements for CO₂ laser

Keiji Ebata, Keiji Fuse, Kenichi Kurisu, Takeshi Okada, Takayuki Hirai, Hirokuni Nanba

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445598
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

We have developed a new design of advanced optics for processing high-power laser material. We introduce the concept of DOE for high power CO₂ lasers. The superior functionality of DOE means that it could become the new standard in optics for next generation devices. Here we describe the design of our DOE technology using scalar theory and micro fabrication using photolithography and RIE. We also present results of our ZnSe-DOE technology, mainly focusing on a novel spot-array generator.

Citation Download Citation

Keiji Ebata, Keiji Fuse, Kenichi Kurisu, Takeshi Okada, Takayuki Hirai, and Hirokuni Nanba "Microfabricated ZnSe diffractive optical elements for CO₂ laser", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445598

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