Modeling a geographically distributed MEMS fabrication network

William L. Benard; Michael A. Huff

doi:10.1117/12.425253

20 April 2001 Modeling a geographically distributed MEMS fabrication network

William L. Benard, Michael A. Huff

Proceedings Volume 4405, Process and Equipment Control in Microelectronic Manufacturing II; (2001) https://doi.org/10.1117/12.425253
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Manufacturing is typically limited to fabrication of parts at a single location, with some sites assembling components from parts made elsewhere. The age of ubiquitous information transfer has made it conceivable to distribute manufacturing geographically, in order to provide access to unique manufacturing capabilities in a flexible manner. If the overhead of a distributed manufacturing network can be adequately reduced, it has the potential to make previously cost ineffective low volume and custom applications economically feasible. The MEMS-Exchange is an infrastructural service available to the domestic microelectromechanical systems community that provides an interface between MEMS designers and microfabrication facilities (academic, commercial, and government labs) which allows designers to develop and exercise custom process sequences in order to realize their devices.

Citation Download Citation

William L. Benard and Michael A. Huff "Modeling a geographically distributed MEMS fabrication network", Proc. SPIE 4405, Process and Equipment Control in Microelectronic Manufacturing II, (20 April 2001); https://doi.org/10.1117/12.425253

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