Phase-shifting interference microscope for the characterization of metallic interconnections of flat panel displays

Pierre Boher; Jean-Philippe Piel; Jean-Louis P. Stehle; Arnaud Dubois; Albert Claude Boccara

doi:10.1117/12.446735

23 October 2001 Phase-shifting interference microscope for the characterization of metallic interconnections of flat panel displays

Pierre Boher, Jean-Philippe Piel, Jean-Louis P. Stehle, Arnaud Dubois, Albert Claude Boccara

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Proceedings Volume 4447, Surface Scattering and Diffraction for Advanced Metrology; (2001) https://doi.org/10.1117/12.446735
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A phase-shifting interference microscope based on the integrating-bucket technique with sinusoidal phase modulation is used to characterize metallic interconnections of flat panel displays. The system uses four frames obtained by integration of the time-varying intensity in an interference pattern during the four quarters of the modulation period. Phase images are produced in real-time at a rate of several Hertz. On single material surfaces, the topology can be deduced directly. When different kinds of materials are present on the surface, like metallic interconnections on glass panel, we show that it is necessary to correct results from the phase change on reflection induced by the difference in refractive indices. Results are compared to scanning tip measurements. The microscope is mounted on a XYZ table to map the surface of the flat panel displays. The homogeneity of the height of metallic interconnections on the entire surface of the panel can be automatically determined. Additional information like metallic surface roughness is also available.

Citation Download Citation

Pierre Boher, Jean-Philippe Piel, Jean-Louis P. Stehle, Arnaud Dubois, and Albert Claude Boccara "Phase-shifting interference microscope for the characterization of metallic interconnections of flat panel displays", Proc. SPIE 4447, Surface Scattering and Diffraction for Advanced Metrology, (23 October 2001); https://doi.org/10.1117/12.446735

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