Optical measurement methods for refractive microlenses and arrays

Norbert Lindlein; Johannes Schwider

doi:10.1117/12.450450

13 December 2001 Optical measurement methods for refractive microlenses and arrays

Norbert Lindlein, Johannes Schwider

Proceedings Volume 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing; (2001) https://doi.org/10.1117/12.450450
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

There are several properties of microlenses which have to be characterized: paraxial parameters like the focal length and more complex properties like the surface quality or the wave aberrations. For arrays of microlenses the homogeneity of the lenses and the accuracy of the positioning may also be very important. Additionally, the surface of the microlenses can have spherical, aspherical or cylindrical shape depending on the application. Several measurement methods for nearly all of these parameters will be presented. A Twyman-Green interferometer is used for the measurement of the surface deviations of a microlens from an ideal spherical shape and for the measurement of the radius of curvature of the surface. A Mach-Zehnder interferometer measures the wave aberrations of microlenses and the focal length. With the help of grazing incidence interferometry all surfaces with cylindrical symmetry can be measured. The cross-section of the surfaces can be circular or non-circular. Diffractive optical elements are applied as beam shaper and reference elements. The testing of complete arrays of microlenses can be done with several methods. A Smartt test can be employed to measure the wave aberrations of an array of microlenses and a shearing device might be suitable to measure the uniformity of the focal lengths of the microlenses.

Citation Download Citation

Norbert Lindlein and Johannes Schwider "Optical measurement methods for refractive microlenses and arrays", Proc. SPIE 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing, (13 December 2001); https://doi.org/10.1117/12.450450

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