Prof. Johannes Schwider Profile

Prof. Johannes Schwider

at Friedrich-Alexander Univ Erlangen-Nürnberg

SPIE Involvement:

Author

Publications (78)

Proceedings Article | 21 June 2019 Paper

Grazing incidence interferometry for testing rough asperics

S. Rothau, K. Mantel, J. Schwider, N. Lindlein

Proceedings Volume 11056, 110561F (2019) https://doi.org/10.1117/12.2525599

KEYWORDS: Axicons, Grazing incidence, Aspheric lenses, Diffraction, Interferometers, Spherical lenses, Interferometry, Beam splitters, Visibility, Wavefronts

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Proceedings Article | 11 August 2008 Paper

Interferometric null test of a parabolic reflector generating a Hertzian dipole field

G. Leuchs, K. Mantel, A. Berger, H. Konermann, M. Sondermann, U. Peschel, N. Lindlein, J. Schwider

Proceedings Volume 7063, 706314 (2008) https://doi.org/10.1117/12.797423

KEYWORDS: Mirrors, Interferometry, Optical spheres, Reflectors, Spherical lenses, Eye, 3D vision, Telescopes, Interferometers, Solids

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Proceedings Article | 11 August 2008 Paper

Coarse frequency comb interferometry

J. Schwider

Proceedings Volume 7063, 706304 (2008) https://doi.org/10.1117/12.793221

KEYWORDS: Interferometers, Frequency combs, Superposition, Fizeau interferometers, Resonators, Interferometry, Optical filters, Light, Light sources, Multimode fibers

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Real wedge interferometers of the Fizeau-type do not allow for fringes in case of a spectral broad band source - or in short: for white light fringes. Here, the use of a suitable frequency comb source will help to overcome this limitation on the one hand and on the other will offer the capability for enhanced phase sensitivity in high precision measurements of surface deviations. Frequency combs can be produced either by using a pulse train from a fs-laser or by passive filtering of the light emitted by a broad band source as a superlum-diode or a fs-laser. The frequency comb produced by a common fs-laser is extremely fine, i.e., the frequency difference of consecutive peaks is very small or the distance of consecutive pulses of the pulse train might be of the order of 1m. Therefore, the coarse pulse train produced by passive filtering of a broad band source is better adapted to the needs of surface testing interferometers. White light fringes are either applied for the profiling of discontinuous surfaces and/or can serve as an indication for the correct choice of multiplication factors in superposition interferometry. During the last decennium it became more and more clear that spatially incoherent sources provide better measuring accuracy in surface measurements due to the reduced influence of dust diffraction patterns. The advantage of laser illumination can nevertheless be maintained if the laser light is made spatially incoherent through moving scatterers in the light path. Here, we will discuss the application of spatially incoherent broad band light frequency filtered through a Fabry-Perot filter. The main applications are in the following fields: (1) surface profiling applications using two-beam Fizeau interferometers, (2) selection of single cavities out of a series of interlaced cavities, and (3) sensitivity enhancement for multi-beam interferometers for planeness or sphericity measurements. Some of the discussed possibilities will be experimentally demonstrated.

Proceedings Article | 25 April 2008 Paper

Benchmarking instrumentation tools for the characterization of microlenses within the EC Network of Excellence on Micro-Optics (NEMO)

H. Ottevaere, J. Schwider, J. Kacperski, L. Steinbock, K. Weible, M. Kujawinska, H. Thienpont

Proceedings Volume 6995, 69950J (2008) https://doi.org/10.1117/12.783514

KEYWORDS: Microlens, Spherical lenses, Source mask optimization, Micro optics, Surface roughness, Beam splitters, Microscopes, Interferometers, Microlens array, Optical fibers

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Proceedings Article | 25 April 2008 Paper

Wave-optical simulation of a grating lateral shearing interferometer with a periodic incoherent light source

Norbert Lindlein, Sarina Wunderlich, Irina Harder, Klaus Mantel, Maik Lano, Johannes Schwider

Proceedings Volume 6994, 699407 (2008) https://doi.org/10.1117/12.783245

KEYWORDS: Light sources, Diffraction, Diffraction gratings, Wave propagation, Shearing interferometers, Sensors, Optical components, Free space, Light wave propagation, Roentgenium

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Proceedings Article | 18 June 2007 Paper

Superposition fringes for profiling applications

J. Schwider

Proceedings Volume 6616, 661627 (2007) https://doi.org/10.1117/12.725038

KEYWORDS: Interferometers, Superposition, Fizeau interferometers, Interferometry, Frequency combs, Light sources, Multimode fibers, Resonators, Objectives, Microscopes

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Proceedings Article | 14 August 2006 Paper

Fringe localization in the Twyman-Green interferometer using extended monochromatic sources

Johannes Schwider

Proceedings Volume 6292, 62920G (2006) https://doi.org/10.1117/12.683711

KEYWORDS: Interferometers, Light sources, Mirrors, Interferometry, Optical spheres, Light, Laser scattering, Sensors, Spatial coherence, Spherical lenses

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Proceedings Article | 28 April 2006 Paper

Characterization of cylindrical microlenses in transmitted light and with grazing incidence interferometry in reflected light

Jürgen Lamprecht, Norbert Lindlein, Johannes Schwider

Proceedings Volume 6188, 618816 (2006) https://doi.org/10.1117/12.662691

KEYWORDS: Diffractive optical elements, Interferometers, Lenses, Grazing incidence, Diffraction, Wavefronts, Interferometry, Beam splitters, CCD cameras, Spatial frequencies

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High numerical aperture cylindrical micro-lenses are needed in collimating the laser light from laser bars in the near infrared. Diffraction limited performance of such collimation lenses can only be obtained if the surface shape deviates strongly from circular symmetry. Therefore, null tests make the use of diffractive optical elements (DOE) necessary. For performance test at the design wavelength the reference DOE produces an ideal cylinder wave which enables the compensation of the wave front coming from the micro-lens to a plane wave. The use of a DOE-master enables beside the null test geometry also a removal of the anamorphic distortion due to the cylinder geometry. The DOEs having a numerical aperture of 0.8 are produced on an e-beam machine. The measurement of the wave aberrations is done with the help of the phase shifting technique. Alignment aberrations are eliminated by a least square fit of suitable misalignment functionals derived from an analytic approximation. The shape of the micro-lenses is tested in reflected light showing surface defects directly. The cylinder symmetry allows for a grazing incidence test using two DOE with nearly constant spatial frequency. There are no limitations concerning the test of high numerical aperture surfaces since the structure of the diffractive elements are parallel curves to the profile curve. The mean spatial frequency of the DOE defines the effective wavelength. Since we use a diffractive interferometer the effective wavelength is identical to the pitch of the DOE. Usually pitches between 4-10 μm are used resulting in a fringe sensitivity of 2-5 Μm. The test delivers the deviation of the surface from the ideal form. In the case of non-circular symmetry the DOE deviates from the axicon type DOE. In addition to the shape deviations also the radius of curvature at the vertex can be measured. The stage for the cylindrical micro-lens is equipped with a length measuring device using grating references from Renishaw providing a length increment of 0.1μm. With the axicon DOE there are two positions where nearly fluffed out fringes can be observed. Starting from the basic test position the lens can be moved until the vertex of the lens coincides with the focal line of the wave generated by the central part of the DOE. The distance between these two positions gives the radius of curvature for the vertex. Modern manufacturing of micro-lenses comprises also hot embossing in plastics or even into glass. Because of the small dimensions of the lenses and the required accuracy of the surface shape also tests of the impressing mould have to be carried out. The DOE approach enables also the test of the embossing form with the same sensitivity as the final test of the lens. Measuring results for the two test methods will be given.

Proceedings Article | 28 April 2006 Paper

Optical characterization of spherical microlenses: a round robin experiment within the EC Network of Excellence on Micro-Optics (NEMO)

Heidi Ottevaere, Johannes Schwider, Jürgen Lamprecht, Jacek Kacperski, Anna Szpak, Lothar Steinbock, Ken Weible, Hugo Thienpont

Proceedings Volume 6188, 618818 (2006) https://doi.org/10.1117/12.663597

KEYWORDS: Microlens, Source mask optimization, Spherical lenses, Micro optics, Beam splitters, Interferometers, Surface roughness, Microscopes, Microlens array, Optical fibers

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Proceedings Article | 27 August 2005 Paper

Uncertainty analysis for phase measurement on PSM with a 193nm common-path shearing interferometer

G. Fuetterer, J. Schwider

Proceedings Volume 5858, 585816 (2005) https://doi.org/10.1117/12.612749

KEYWORDS: Phase measurement, Shearing interferometers, Interferometers, Phase shifting, Phase shifts, Wavefronts, Light sources, Sensors, Wave propagation, Prototyping

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Scaling down the critical dimension (CD) also requires a reduction of systematic and stochastic errors in the measurement of phase shifts introduced by phase shift masks (PSM). Furthermore, in current mask design all degrees of freedom are used to satisfy the requirements and consequently different types like attenuated or alternate PSM are in use. A direct measurement of the introduced phase shift - the wave field propagating from the mask - is mandatory to further reduce the CD error budget. Although different interferometer set-ups might be used, a common path design enables a high repeatability of the measured phase values by being less sensitive to vibrations and air turbulence. Furthermore systematic errors due to different optical aberrations present in different arms of an interferometer are eliminated. A lateral shearing interferometer was realized by adding two phase gratings and one amplitude grating to a microscope working in transmission. Thus a very stable tool for the measurement of phase shifting structures at λ = 193nm was obtained. The repeatability of the phase measurement is less than 2π/1300. A simple evaluation can be used if the lateral restricted phase shifting region is doubled, i.e. the phase ridge is compared with a neutral surrounding area. This situation of a totally sheared object is obtained if the amount of the shear s is larger than the object's lateral distance d. Moreover, this method provides a larger number of measured phase values compared to the case of differential phase contrast. To reduce the contribution of the visibility to the uncertainty budget the spatial degree of coherence was tailored to obtain a visibility V > 0,8 even at large shear distances. The 5-phase algorithm was used to introduce the reference phase steps Δφ_i. A model based description of the measurement was made. The uncertainty of the measured phase value of the introduced interferometer is |Δφmax| = 2π/330 if an optimal alignment of the system is achieved. This value can be reduced by a factor of 2 if the dependence of the phase shifting algorithm on the measured phase value is taken into account. A further reduction can be obtained if an intensity monitoring is implemented. Measurements performed at different adjustment states are given to discuss e.g. the influence of the adjustment of the two phase gratings on the uncertainty budget. The estimation of the phase values and the dependence of this values on the layout of the object, respectively the surrounding area will be discussed. Although the results obtained - due to the prototype status - are not yet completely satisfactory, the described analysis proves the potential of the newly developed interferometer for further reduction of uncertainty and possible use as a reference phase measurement instrumentation.

Proceedings Article | 14 February 2005 Paper

Diffractive lateral-shearing interferometer for phase-shift mask measurement using an excimer laser source

Johannes Schwider, Gerald Fuetterer, Norbert Lindlein

Proceedings Volume 5776, (2005) https://doi.org/10.1117/12.611690

KEYWORDS: Phase shifts, Light sources, Photomasks, Interferometers, Shearing interferometers, Phase measurement, Diffraction gratings, Diffraction, Excimer lasers, Wavefronts

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Proceedings Article | 1 September 2004 Paper

Homogenization and beam shaping with microlens arrays

Irina Harder, Maik Lano, Norbert Lindlein, Johannes Schwider

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.549015

KEYWORDS: Light sources, Microlens array, Sensors, Light emitting diodes, Microlens, Homogenization, Beam shaping, Lithography, Diffraction, Spatial coherence

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Proceedings Article | 22 December 2003 Paper

Null test measurement of high-numerical-aperture cylindrical microlenses in transmitted light

Juergen Lamprecht, Norbert Lindlein, Johannes Schwider

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.505547

KEYWORDS: Diffractive optical elements, Wavefronts, Lenses, Diffraction, Near infrared, Wavefront sensors, Semiconductor lasers, Interferometers, CCD cameras, Etching

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Proceedings Article | 19 November 2003 Paper

Characterization of cylindrical lenses with the help of grazing incidence interferometry for micro- and macro-optics

Johannes Schwider, Norbert Lindlein, Klaus Mantel, Roland Schreiner

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.524582

KEYWORDS: Diffractive optical elements, Grazing incidence, Interferometers, Beam splitters, Interferometry, Beam shaping, Cylindrical lenses, Laser beam diagnostics, Spatial frequencies, Diffraction

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Proceedings Article | 30 July 2002 Paper

Interference patterning of gratings with a period of 150 nm at a wavelength of 157 nm

Gerald Fuetterer, Waltraud Herbst, Joerg Rottstegge, Margit Ferstl, Michael Sebald, Johannes Schwider

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474559

KEYWORDS: Diffraction gratings, Semiconducting wafers, Diffraction, Excimer lasers, Polarizers, Mirrors, Photoresist materials, Spatial coherence, Telescopes, Lithography

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Proceedings Article | 30 July 2002 Paper

Lateral shearing interferometer for phase-shift mask measurement at 193 nm

Gerald Fuetterer, M. Lano, Norbert Lindlein, Johannes Schwider

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474601

KEYWORDS: Phase shifts, Light sources, Photomasks, Shearing interferometers, Phase measurement, Interferometers, Diffraction gratings, Wavefronts, Diffraction, Superposition

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Proceedings Article | 24 July 2002 Paper

Ultrathin film imaging at 157 nm

Joerg Rottstegge, Waltraud Herbst, Stefan Hien, Gerald Fuetterer, Christian Eschbaumer, Christoph Hohle, Johannes Schwider, Michael Sebald

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474249

KEYWORDS: Silicon, Etching, Polymers, Photoresist processing, Resistance, Photomasks, Polymer thin films, Lithography, Plasma, Thin films

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Proceedings Article | 20 June 2002 Paper

Three-lambda metrology

Andreas Pfoertner, Johannes Schwider

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472219

KEYWORDS: Interferometers, Beam splitters, Interferometry, Phase shifts, Diffractive optical elements, Phase interferometry, CCD cameras, Metrology, Phase shifting, Transducers

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Proceedings Article | 19 June 2002 Paper

Interferometric testing of refractive microcylinder lenses

Johannes Schwider, Juergen Lamprecht

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473538

KEYWORDS: Diffractive optical elements, Interferometers, Lenses, Interferometry, Beam shaping, Optical testing, Wavefronts, Grazing incidence, Aspheric lenses, Beam splitters

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Proceedings Article | 13 December 2001 Paper

Microlens arrays fabricated by deep lithography with protons and their characterization

Heidi Ottevaere, Patrik Tuteleers, B Volchaerts, Valerie Baukens, Juergen Lamprecht, Johannes Schwider, Alex Hermanne, Kris Naessens, Irina Veretennicoff, Hugo Thienpont

Proceedings Volume 4455, (2001) https://doi.org/10.1117/12.450451

KEYWORDS: Microlens, Microlens array, Diffusion, Digital Light Processing, Lithography, Monochromatic aberrations, Polymethylmethacrylate, Calibration, Silicon, Polymers

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Proceedings Article | 13 December 2001 Paper

Optical measurement methods for refractive microlenses and arrays

Norbert Lindlein, Johannes Schwider

Proceedings Volume 4455, (2001) https://doi.org/10.1117/12.450450

KEYWORDS: Microlens, Microlens array, Lenses, Spherical lenses, Interferometers, Diffractive optical elements, Objectives, Grazing incidence, Mach-Zehnder interferometers, Optical testing

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Proceedings Article | 9 November 2001 Paper

Interferometrical measurement of cylindrical lenses with the help of computer-generated holograms

Norbert Lindlein, Juergen Lamprecht, Klaus Mantel, Johannes Schwider

Proceedings Volume 4440, (2001) https://doi.org/10.1117/12.448032

KEYWORDS: Diffractive optical elements, Interferometry, Cylindrical lenses, Grazing incidence, Diffraction, Interferometers, Wavefronts, Computer generated holography, Lens design, Aspheric lenses

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SPIE Journal Paper | 1 May 2001

Algorithm for expanding the dynamic range of a Shack-Hartmann sensor by using a spatial light modulator

Norbert Lindlein, Johannes Pfund, Johannes Schwider

OE, Vol. 40, Issue 05, (May 2001) https://doi.org/10.1117/12.10.1117/1.1357193

KEYWORDS: Switching, Sensors, Wavefront sensors, Spatial light modulators, Wavefronts, Switches, Microlens array, Lenses, Binary data, Microlens

SPIE Journal Paper | 1 August 2000

Expansion of the dynamic range of a Shack-Hartmann sensor by using astigmatic microlenses

Norbert Lindlein, Johannes Pfund, Johannes Schwider

OE, Vol. 39, Issue 08, (August 2000) https://doi.org/10.1117/12.10.1117/1.1304846

KEYWORDS: Microlens, Sensors, Wavefronts, Lenses, Monochromatic aberrations, Wavefront sensors, Spherical lenses, Microlens array, Optical engineering, Glasses

SPIE Journal Paper | 1 April 2000

Three channel phase-shifting interferometer using polarization-optics and a diffraction grating

Andrea Hettwer, Jochen Kranz, Johannes Schwider

OE, Vol. 39, Issue 04, (April 2000) https://doi.org/10.1117/12.10.1117/1.602453

KEYWORDS: Phase shifts, Interferometers, Diffraction gratings, Cameras, Etching, Polarization, Error analysis, Optical engineering, Telescopes, Binary data

Proceedings Article | 9 September 1999 Paper

Interferometric testing of technical surfaces by grazing incidence interferometry in the infrared region

Roland Schreiner, Sven Brinkmann, Thomas Dresel, Johannes Schwider

Proceedings Volume 3823, (1999) https://doi.org/10.1117/12.360979

KEYWORDS: Computer generated holography, Interferometry, Infrared radiation, Interferometers, Diffraction, Grazing incidence, Axicons, Speckle, Optical testing, Wavefronts

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Proceedings Article | 17 August 1999 Paper

Apochromatic reflection optics used in UV interferometry

Andreas Pfoertner, Wolfgang Emer, Johannes Schwider

Proceedings Volume 3745, (1999) https://doi.org/10.1117/12.357805

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Proceedings Article | 17 August 1999 Paper

Partially coherent illumination in interferometry for optical testing

Johannes Schwider

Proceedings Volume 3745, (1999) https://doi.org/10.1117/12.357761

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The production of high quality optical components heavily relies on interferometric testing methods /1/. Before the invention of the laser proof glass methods dominated in the production line of the optical shop. Only in scientific labs or special testing laboratories Fizeau- and Twyman-Green interferometers were used. The reason was that the illuminating sources were spatially incoherent spectrum lamps or in the best case isotope lamps /2/. In order to obtain contrast-rich fringe patterns one had to stop down the light sources or in more involved cases to adapt the reference arm-length /3/. The big advantage of the fringes with partially coherent illumination was their smoothness enabling very high measuring accuracy. But extended incoherent and monochromatic sources restricted the interferometer design to the most simple devices as the Fizeau- and the Michelson-interferometer and with special precautions also to the Twyman-Green interferometer. With the invention ofthe laser interferometry became a fool proofmatter. The high spatial and temporal coherence of single mode laser radiation together with the high luminosity ofthe laser allows for total design freedom. This is of course a great advantage on the one hand but on the other the high degree of coherence is responsible for the disturbances caused by small scattering particles in the ray path which cause so called dust diffraction patterns. Through this effect the measured phase is disturbed by stochastic phase variations which limit the wavefront smoothness to the /1OO-level. Although a well designed interferometer will be almost free from the latter problem in some regions ofthe field of view in others the disturbance will remain. In two-dimensional measurements of phase distributions as in optical testing applications these disturbances can not be averaged out as in the case of simple length measuring devices /4/. There will always be a repeatability problem with varying adjustments of the interferometer. In modern interferometers CCD-detection is state of the art and therefore measurements with these devices show the problem very clearly. As will be shown, the repeatability problems with two-dimensional shape measurements result from the dimensionality and not from the ultimate sensitivity. With zero-dimensional length measurements the accuracy can be of the order I O or better since one averages over many dust diffraction patterns with the detecting area. In contrast to this two-dimensional measurements only reach iO to i04 accuracy levels with some effort.

Proceedings Article | 19 July 1999 Paper

Grazing incidence interferometry with the help of diffractive masters

Johannes Schwider, Sven Brinkmann, Roland Schreiner, Thomas Dresel

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354753

KEYWORDS: Grazing incidence, Interferometry, Diffractive optical elements, Beam splitters, Interferometers, Wavefronts, Phase shifting, Sensors, Detector arrays, Staring arrays

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Proceedings Article | 19 July 1999 Paper

Aspherical surface testing by using spherical compensation

Johannes Pfund, Norbert Lindlein, Johannes Schwider

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354736

KEYWORDS: Sensors, Spherical lenses, Aspheric lenses, Wavefront sensors, Optical testing, Wavefronts, Reconstruction algorithms, Interferometry, Computer generated holography, Telescopes

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Proceedings Article | 19 July 1999 Paper

Error analysis for a single-frame phase-shifting speckle interferometer

Jochen Kranz, Andrea Hettwer, Juergen Lamprecht, Johannes Schwider

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.355066

KEYWORDS: Error analysis, Phase shifts, Camera shutters, CCD cameras, Interferometers, Diffractive optical elements, Beam splitters, Cameras, Phase interferometry, Charge-coupled devices

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Proceedings Article | 19 July 1999 Paper

Testing of cylindrical lenses by grazing incidence interferometry

Hans Nuerge, Johannes Schwider

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354913

KEYWORDS: Diffractive optical elements, Grazing incidence, Cylindrical lenses, Interferometry, Surface finishing, Lenses, Optical design, Phase shifts, Beam splitters, Optical fabrication

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Proceedings Article | 29 April 1999 Paper

Twyman Green interferometer with CGH for testing of cylindrical surfaces

D. Sharma, Johannes Schwider

Proceedings Volume 3729, (1999) https://doi.org/10.1117/12.346815

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Proceedings Article | 29 September 1998 Paper

Measurement devices with and for micro-optics at the University of Erlangen

Norbert Lindlein, Johannes Schwider

Proceedings Volume 3407, (1998) https://doi.org/10.1117/12.323352

KEYWORDS: Microlens, Microscopes, Measurement devices, Wavefronts, Spherical lenses, Optical spheres, Microlens array, Wavefront sensors, Confocal microscopy, Interferometers

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Proceedings Article | 29 September 1998 Paper

Fiber optical single-frame speckle interferometer for measuring industrial surfaces

Jochen Kranz, Juergen Lamprecht, Andrea Hettwer, Johannes Schwider

Proceedings Volume 3407, (1998) https://doi.org/10.1117/12.323335

KEYWORDS: Interferometers, Fiber optics, Speckle, CCD cameras, Cameras, Speckle interferometry, Polarizers, Binary data, Beam splitters, Fiber optics tests

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Proceedings Article | 29 September 1998 Paper

Optical testing of cylindrical surfaces by grazing incidence interferometry in the infrared region

Roland Schreiner, Sven Brinkmann, Thomas Dresel, Johannes Schwider

Proceedings Volume 3407, (1998) https://doi.org/10.1117/12.323354

KEYWORDS: Interferometry, Axicons, Grazing incidence, Infrared radiation, Diffraction, Speckle, Visible radiation, Optical testing, Interferometers, Wavefronts

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SPIE Journal Paper | 1 September 1998

Interferometric testing of plane and cylindrical workpieces with computer-generated holograms

Sven Brinkmann, Roland Schreiner, Thomas Dresel, Johannes Schwider

OE, Vol. 37, Issue 09, (September 1998) https://doi.org/10.1117/12.10.1117/1.601759

KEYWORDS: Computer generated holography, Interferometry, Interferometers, Wavefronts, Axicons, Photomasks, Profilometers, Grazing incidence, Diffraction, Beam splitters

Proceedings Article | 30 June 1998 Paper

Interferometry with VUV wavelengths

Wolfgang Emer, Johannes Schwider

Proceedings Volume 3478, (1998) https://doi.org/10.1117/12.312937

KEYWORDS: Interferometry, Vacuum ultraviolet, Objectives, Light sources, Interferometers, Mirrors, Excimer lasers, Sensors, Beam splitters, Imaging systems

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SPIE Journal Paper | 1 June 1998

Simulation of micro-optical array systems with RAYTRACE

Norbert Lindlein, Frank Simon, Johannes Schwider

OE, Vol. 37, Issue 06, (June 1998) https://doi.org/10.1117/12.10.1117/1.601725

KEYWORDS: Chemical elements, Microlens array, Ray tracing, Wave propagation, Diffraction, Optical components, Optical design, Wavefront sensors, Light sources, Sensors

Proceedings Article | 17 September 1997 Paper

Interferometric testing of technical surfaces with computer-generated holograms

Sven Brinkmann, Roland Schreiner, Thomas Dresel, Johannes Schwider

Proceedings Volume 3098, (1997) https://doi.org/10.1117/12.281148

KEYWORDS: Computer generated holography, Interferometry, Interferometers, Wavefronts, Axicons, Grazing incidence, Profilometers, Beam splitters, Diffraction, Manufacturing

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SPIE Journal Paper | 1 May 1997

Speckle shearing interferometry using a diffractive optical beam splitter

Arnd Gundlach, Jonathan Huntley, Bernd Manzke, Johannes Schwider

OE, Vol. 36, Issue 05, (May 1997) https://doi.org/10.1117/12.10.1117/1.601351

KEYWORDS: Diffraction gratings, Speckle, Diffraction, Speckle pattern, Interferometry, Phase shifts, Shearography, Phase measurement, Beam splitters, Interferometers

SPIE Journal Paper | 1 October 1996

Transferring resist microlenses into silicon by reactive ion etching

Martin Eisner, Johannes Schwider

OE, Vol. 35, Issue 10, (October 1996) https://doi.org/10.1117/12.10.1117/1.600981

KEYWORDS: Etching, Silicon, Microlens, Lenses, Reactive ion etching, Ions, Photoresist processing, Spherical lenses, Glasses, Optical spheres

SPIE Journal Paper | 1 July 1996

Diffraction-limited holographic lenses in dichromated gelatine

Oliver Falkenstoerfer, Norbert Lindlein, Tuula Keinonen, Johannes Schwider

OE, Vol. 35, Issue 07, (July 1996) https://doi.org/10.1117/12.10.1117/1.600781

KEYWORDS: Holography, Lenses, Computer generated holography, Aspheric lenses, Spherical lenses, Diffraction, Holographic optical elements, Wavefronts, Interferometers, Interferometry

Proceedings Article | 24 April 1996 Paper

Multiwavelength pulse oximetry in the measurement of hemoglobin fractions

Bernd Manzke, Johannes Schwider, Norbert Lutter, Kai Engelhardt, Wilhelm Stork

Proceedings Volume 2676, (1996) https://doi.org/10.1117/12.238813

KEYWORDS: Light emitting diodes, Oximeters, Semiconductor lasers, Signal to noise ratio, Oximetry, Spectroscopy, Blood, Diodes, In vitro testing, Radiometry

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Proceedings Article | 24 April 1996 Paper

Mainstream sensor unit for closed-circle anesthetic gas monitoring

Stephan Junger, Norbert Lutter, Johannes Schwider, Dieter Goettler, Norbert Weber, Edmund Burte

Proceedings Volume 2676, (1996) https://doi.org/10.1117/12.238799

KEYWORDS: Sensors, Infrared spectroscopy, Infrared sensors, Infrared radiation, Calibration, Absorption, Signal detection, Interference filters, Infrared detectors, Signal processing

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SPIE Journal Paper | 1 March 1996

Achromatic design of holographic optical interconnects

Johannes Schwider

OE, Vol. 35, Issue 03, (March 1996) https://doi.org/10.1117/12.10.1117/1.600636

KEYWORDS: Optical design, Optical interconnects, Holographic optical elements, Holography, Transmitters, Sensors, Glasses, Mirrors, Diffractive optical elements, Optical components

SPIE Journal Paper | 1 March 1996

Subwavelength structures and their use in diffractive optics

Peter Kipfer, Martin Collischon, Helmut Haidner, Johannes Schwider

OE, Vol. 35, Issue 03, (March 1996) https://doi.org/10.1117/12.10.1117/1.600640

KEYWORDS: Diffraction gratings, Diffraction, Dielectrics, Mirrors, Reflectivity, Dielectric polarization, Metals, Binary data, Waveguides, Modulation

SPIE Journal Paper | 1 December 1995

Grazing incidence interferometry applied to the measurement of cylindrical surfaces

Thomas Dresel, Johannes Schwider, Alexander Wehrhahn, Sergey Babin

OE, Vol. 34, Issue 12, (December 1995) https://doi.org/10.1117/12.10.1117/12.215456

KEYWORDS: Axicons, Interferometry, Grazing incidence, Wavefronts, Interferometers, Computer generated holography, Phase shifts, Holograms, Diffraction, Binary data

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SPIE Journal Paper | 1 October 1995

Twyman-Green interferometer for testing microspheres

Johannes Schwider, Oliver Falkenstoerfer

OE, Vol. 34, Issue 10, (October 1995) https://doi.org/10.1117/12.10.1117/12.210737

KEYWORDS: Interferometers, Mirrors, Objectives, Spherical lenses, Reflection, Wavefronts, Zoom lenses, Spatial coherence, Temporal coherence, Optical spheres

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Proceedings Article | 11 August 1995 Paper

Achromatic design of holographic optical interconnects

Johannes Schwider

Proceedings Volume 2537, (1995) https://doi.org/10.1117/12.216380

KEYWORDS: Transmitters, Optical interconnects, Optical design, Sensors, Holographic optical elements, Diffractive optical elements, Holography, Diffraction, Glasses, Mirrors

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Proceedings Article | 12 December 1994 Paper

Dispersive white-light profilometer

Johannes Schwider, Liang Zhou

Proceedings Volume 2340, (1994) https://doi.org/10.1117/12.195934

KEYWORDS: Profilometers, Spectroscopy, Imaging systems, Interferometers, Interferometry, Diffraction gratings, CCD cameras, Convolution, Information operations, Fringe analysis

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Proceedings Article | 4 November 1994 Paper

Applications of diffractive optical elements for high-power lasers

Joachim Hutfless, Thomas Rebhan, Manfred Geiger, Martin Collischon, Thomas Dresel, Marcus Frank, Anette Lang, Johannes Schwider, Norbert Streibl, Helmut Haidner, Peter Kipfer, Martin Maerz

Proceedings Volume 2246, (1994) https://doi.org/10.1117/12.193113

KEYWORDS: Diffraction, Diffraction gratings, Diffractive optical elements, Beam splitters, Reflectivity, High power lasers, Carbon dioxide lasers, Mirrors, Optical components, Laser processing

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Proceedings Article | 17 October 1994 Paper

Diffractive optical reflection elements for the infrared based on artificial dielectrics

Peter Kipfer, Martin Collischon, Helmut Haidner, Johannes Schwider

Proceedings Volume 2269, (1994) https://doi.org/10.1117/12.188696

KEYWORDS: Dielectrics, Diffraction, Diffraction gratings, Reflectivity, Mirrors, Dielectric polarization, Metals, Waveguides, Infrared technology, Binary data

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Proceedings Article | 12 October 1994 Paper

Reactive ion etching of microlens arrays into fused silica

Stefan Haselbeck, Martin Eisner, Horst Schreiber, Johannes Schwider

Proceedings Volume 2169, (1994) https://doi.org/10.1117/12.190220

KEYWORDS: Etching, Reactive ion etching, Photoresist materials, Silica, Microlens array, Microlens, Point spread functions, Modulation transfer functions, Glasses, Gases

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Proceedings Article | 12 October 1994 Paper

Diffractive surface relief elements for use in the infrared: waveguide structures as reflection holograms

Peter Kipfer, Martin Collischon, Helmut Haidner, Johannes Schwider

Proceedings Volume 2169, (1994) https://doi.org/10.1117/12.190215

KEYWORDS: Waveguides, Mirrors, Dielectrics, Chemical elements, Diffraction, Infrared radiation, Reflectivity, Binary data, Silver, Reflection

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Proceedings Article | 12 October 1994 Paper

Iterative correction of holographic lenses

Oliver Falkenstoerfer, T. Keinonen, Norbert Lindlein, Johannes Schwider, Norbert Streibl

Proceedings Volume 2169, (1994) https://doi.org/10.1117/12.190229

KEYWORDS: Holography, Holographic optical elements, Diffraction, Computer generated holography, Optical components, Aspheric lenses, Ray tracing, Lenses, Spherical lenses, Optics manufacturing

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SPIE Journal Paper | 1 August 1994

Characterization of microlenses using a phase-shifting shearing interferometer

Horst Sickinger, Oliver Falkenstoerfer, Norbert Lindlein, Johannes Schwider

OE, Vol. 33, Issue 08, (August 1994) https://doi.org/10.1117/12.10.1117/12.173567

KEYWORDS: Wavefronts, Shearing interferometers, Mirrors, Microlens, Interferometry, Phase shifts, Phase measurement, Molybdenum, Interferometers, Ferroelectric materials

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Proceedings Article | 17 June 1994 Paper

Achromatic diffractive fan-out systems

Markus Schwab, Norbert Lindlein, Johannes Schwider, Yaakov Amitai, Asher Friesem, Silviu Reinhorn

Proceedings Volume 2152, (1994) https://doi.org/10.1117/12.178071

KEYWORDS: Lenses, Diffractive optical elements, Diffraction, Microlens, Wavefronts, Fluctuations and noise, Diffraction gratings, Optical components, Optical design, Contact lenses

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SPIE Journal Paper | 1 January 1994

Infrared optical components based on a microrelief structure

Peter Kipfer, Martin Collischon, Helmut Haidner, John Sheridan, Johannes Schwider, Norbert Streibl, Juergen Lindolf

OE, Vol. 33, Issue 01, (January 1994) https://doi.org/10.1117/12.10.1117/12.155375

KEYWORDS: Diffraction gratings, Mirrors, Polarization, Diffraction, Binary data, Infrared radiation, Optical components, Manufacturing, Diffractive optical elements, Beam splitters

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Proceedings Article | 15 December 1993 Paper

Production and control of refractive and diffractive microlenses

Johannes Schwider, Stefan Haselbeck, Horst Schreiber, Horst Sickinger, Oliver Falkenstoerfer, Norbert Lindlein, Andreas Zoeller, Helmut Haidner, Peter Kipfer, M. Heissmeier, Tuula Keinonen, John Sheridan, Sven Brinkmann, Norbert Streibl

Proceedings Volume 1992, (1993) https://doi.org/10.1117/12.165679

KEYWORDS: Lenses, Computer generated holography, Microlens, Diffraction, Wavefronts, Interferometers, Photoresist materials, Photomasks, Microscopes, Spherical lenses

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SPIE Journal Paper | 1 August 1993

New compensating four-phase algorithm for phase-shift interferometry

Johannes Schwider, Oliver Falkenstoerfer, Horst Schreiber, Andreas Zoeller, Norbert Streibl

OE, Vol. 32, Issue 08, (August 1993) https://doi.org/10.1117/12.10.1117/12.143340

KEYWORDS: Interferometry, Phase interferometry, Phase measurement, Interferometers, Information technology, Phase shifts, Error analysis, Glasses, Optical engineering, Algorithms

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SPIE Journal Paper | 1 August 1993

Polarizing reflection grating beamsplitter for the 10.6-μm wavelength

Helmut Haidner, Peter Kipfer, John Sheridan, Johannes Schwider, Norbert Streibl, Juergen Lindolf, Martin Collischon, Anette Lang, Joachim Hutfless

OE, Vol. 32, Issue 08, (August 1993) https://doi.org/10.1117/12.10.1117/12.143341

KEYWORDS: Diffraction, Diffraction gratings, Beam splitters, Polarization, Silicon, Reflection, Semiconducting wafers, Photoresist materials, Refractive index, Metals

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Proceedings Article | 23 July 1993 Paper

New compensating 4-phase-algorithm for phase shifting interferometry

J. Schwider

Proceedings Volume 1983, 19838C (1993) https://doi.org/10.1117/12.2308719

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Proceedings Article | 1 July 1993 Paper

Optoelectronic interconnects with holographic optical elements

Reinhard Voelkel, M. Heissmeier, Harald Kobolla, Ulrich Krackhardt, S. Rosner, Juerg Schmidt, Johannes Schwider, John Sheridan, Norbert Streibl, F. Zobel

Proceedings Volume 1849, (1993) https://doi.org/10.1117/12.147109

KEYWORDS: Diffraction, Holographic optical elements, Mirrors, Optoelectronics, Holography, Geometrical optics, Free space optics, Diffraction gratings, Channel projecting optics, Optical interconnects

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SPIE Journal Paper | 1 June 1993

Microlenses fabricated by melting a photoresist on a base layer

Stefan Haselbeck, Horst Schreiber, Johannes Schwider, Norbert Streibl

OE, Vol. 32, Issue 06, (June 1993) https://doi.org/10.1117/12.10.1117/12.135845

KEYWORDS: Microlens, Photoresist materials, Glasses, Lenses, Mach-Zehnder interferometers, Liquids, Interferometry, Point spread functions, Modulation transfer functions, Spherical lenses

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SPIE Journal Paper | 1 April 1993

Synthetic holograms written by a laser pattern generator

Ulrich Krackhardt, Johannes Schwider, M. Schrader, Norbert Streibl

OE, Vol. 32, Issue 04, (April 1993) https://doi.org/10.1117/12.10.1117/12.61207

KEYWORDS: Holograms, Moire patterns, Diffraction gratings, Diffraction, Raster graphics, Zone plates, Lithography, Quantization, Wavefronts, Beam splitters

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Proceedings Article | 2 March 1993 Paper

Holographic optical elements for interconnects and sensors

Juerg Schmidt, Reinhard Voelkel, Johannes Schwider, John Sheridan, Wilhelm Stork, Norbert Streibl, M. Stieglmeier, Franz Durst

Proceedings Volume 1732, (1993) https://doi.org/10.1117/12.140406

KEYWORDS: Holographic optical elements, Beam splitters, Sensors, Semiconductor lasers, Holography, Laser Doppler velocimetry, Diffraction, Glasses, Optical components, Diffraction gratings

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Proceedings Article | 2 March 1993 Paper

Mixed polarization 2D holographic permutation elements

Harald Kobolla, John Sheridan, Ekkehard Gluch, Johannes Schwider, Norbert Streibl

Proceedings Volume 1732, (1993) https://doi.org/10.1117/12.140407

KEYWORDS: Holography, Diffraction, Polarization, Diffraction gratings, Holograms, Modulation, Optical design, Switching, Holographic optical elements, Volume holography

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Proceedings Article | 2 March 1993 Paper

Laser beam writing of computer-generated diffractive optical components

Norbert Streibl, M. Heissmeier, Walter Hofmann, Ulrich Krackhardt, M. Schrader, Johannes Schwider, Martin Sperl

Proceedings Volume 1732, (1993) https://doi.org/10.1117/12.140457

KEYWORDS: Holograms, Raster graphics, Diffraction, Optical components, Wavefronts, Holography, Zone plates, Diffraction gratings, Optical fabrication equipment, Beam splitters

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Proceedings Article | 2 March 1993 Paper

Measurement of the wave aberrations of holographic optical lens elements

Oliver Falkenstoerfer, Johannes Schwider, Albrecht Boehm, Horst Schreiber

Proceedings Volume 1732, (1993) https://doi.org/10.1117/12.140389

KEYWORDS: Holographic optical elements, Holography, Interferometers, Point spread functions, Optical spheres, Optical components, Zernike polynomials, Modulation transfer functions, Diffraction, Calibration

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Proceedings Article | 13 January 1993 Paper

Holographic optical coupling and beamsplitting elements for optoelectronic interconnects and sensors

Juerg Schmidt, Reinhard Voelkel, S. Rosner, Wilhelm Stork, John Sheridan, Franz Durst, Johannes Schwider, Norbert Streibl

Proceedings Volume 1751, (1993) https://doi.org/10.1117/12.138889

KEYWORDS: Glasses, Sensors, Holographic optical elements, Holography, Optical components, Optoelectronics, Reflection, Semiconductor lasers, Laser Doppler velocimetry, Holograms

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Proceedings Article | 5 January 1993 Paper

Computer-generated holograms for the correction of the aberrations of thick holographic optical lens elements

Norbert Lindlein, Johannes Schwider, P. Habel, M. Schrader

Proceedings Volume 1718, (1993) https://doi.org/10.1117/12.138561

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Proceedings Article | 5 January 1993 Paper

Measurement of the wave aberrations of holographic optical lens elements

Oliver Falkenstoerfer, Johannes Schwider, Albrecht Boehm, Horst Schreiber

Proceedings Volume 1718, (1993) https://doi.org/10.1117/12.138565

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Proceedings Article | 5 January 1993 Paper

Synthetic phase holograms written by laser lithography

Stefan Haselbeck, M. Heissmeier, Walter Hofmann, Ulrich Krackhardt, Bernd Manzke, Pekka Savander, M. Schrader, Johannes Schwider, Martin Sperl, Norbert Streibl

Proceedings Volume 1718, (1993) https://doi.org/10.1117/12.138557

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SPIE Journal Paper | 1 October 1991

Optoelectronic interconnection based on a light-guiding plate with holographic coupling elements

H.-J. Haumann, Harald Kobolla, Frank Sauer, Juerg Schmidt, Johannes Schwider, Wilhelm Stork, Norbert Streibl, Reinhard Voelkel

OE, Vol. 30, Issue 10, (October 1991) https://doi.org/10.1117/12.10.1117/12.55955

KEYWORDS: Glasses, Holography, Optoelectronics, Sensors, Collimation, Semiconductor lasers, PIN photodiodes, Waveguides, Reflection, Data communications

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Proceedings Article | 1 September 1991 Paper

Holographic space-variant prism arrays for free-space data permutation in digital optical networks

Harald Kobolla, Frank Sauer, Johannes Schwider, Norbert Streibl, Reinhard Voelkel

Proceedings Volume 1507, (1991) https://doi.org/10.1117/12.47040

KEYWORDS: Holography, Signal to noise ratio, Prisms, Diffraction, Digital holography, Optical components, Optical networks, Data processing, Networks, Free space optics

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