Damping caused by the gas flow in the holes of perforated structures

Heng Yang; Minhang Bao; Lukasz Pakula; Patrick J. French

doi:10.1117/12.448862

19 November 2001 Damping caused by the gas flow in the holes of perforated structures

Heng Yang, Minhang Bao, Lukasz Pakula, Patrick J. French

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448862
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

This paper investigates the effect of gas flow in holes on the squeeze film damping of perforated structures. An infinite perforated plate with circular holes is analyzed with an analytical model. The results show that there is a minimum damping ratio for a certain size ratio. The corresponding hole size can be defined as a critical size. When the hole size is smaller than the critical size, the hole effect dominates. The damping ratio increases drastically with hole size decreasing when the size ratio keeps constant. Some finite two-dimensional structures are analyzed with an equivalent circuit model. Similar results are obtained. The finite two-dimensional structures and some quasi three-dimensional structures are also simulated with ANSYS/FLOTRAN. The results are presented.

Citation Download Citation

Heng Yang, Minhang Bao, Lukasz Pakula, and Patrick J. French "Damping caused by the gas flow in the holes of perforated structures", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448862

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available