Modeling and analysis for moving plate with two-dimensional effect

Tian-yi Liu; Wei-hua Li; Qing-an Huang

doi:10.1117/12.835568

24 August 2009 Modeling and analysis for moving plate with two-dimensional effect

Tian-yi Liu, Wei-hua Li, Qing-an Huang

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73812R (2009) https://doi.org/10.1117/12.835568
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

A conventional one-dimensional model for an electrostatically actuated beam only considers elastic force and electrostatic force. This paper puts forward a novel method in order to describe the variable cross-section beam. Three improvements are taken into account. First, the supported force for the cross-section is pondered. Second, the displacement of each points of the beam deviates from the ideal function. Third, the displacement differs both in x-axis and y-axis. In addition, there is a mathematic redundancy about integral when the electrostatic force is calculated. Therefore, a mathematical approximation is proposed, by which the mathematical computation can be remarkably simplified while the accuracy is ensured. To validate the novel mode, the displacement of mid-point and the resonant frequency of the beam were calculated as far as these three modifications were concerned. The simulations by a Finite Element Method (FEM) CoventWare have been compared with the novel model. It is shown that the two-dimensional (2-D) model for the variable cross-section beam would be useful.

Citation Download Citation

Tian-yi Liu, Wei-hua Li, and Qing-an Huang "Modeling and analysis for moving plate with two-dimensional effect", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73812R (24 August 2009); https://doi.org/10.1117/12.835568

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