Design considerations of the biaxial frequency-shifted microaccelerometer

Deng-Huei Hwang; Yi-Chung Lo; Kanping Chin

doi:10.1117/12.448837

19 November 2001 Design considerations of the biaxial frequency-shifted microaccelerometer

Deng-Huei Hwang, Yi-Chung Lo, Kanping Chin

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448837
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

By investigating microaccelerometers with various configurations including the amplitude type and the resonant type, we summarize that dynamic behavior, geometry, structure rigidity and dimension are important considerations to design a microaccelerometer. In which, a linear dynamic response is better for its easiness to be processed, and a significant variation tendency in responding to the detected acceleration is required. A good geometry is necessary to decouple a detected acceleration, such as a 2D or 3D acceleration into two or three measurable independent accelerations components. In addition, a strong rigidity and stiffness are necessary to avoid the influence, such as the associated crosstalk from other non-interested acceleration, e.g., gravitation. Moreover, the dimensions of the structural components dominate the mechanical and electrical sensitivity of the device. We utilize these considerations to design a biaxil frequency-shifted microaccelerometer. This accelerometer is configured with a central proof mass connected via four identical and symmetrical beams with high-aspect ratio, and operates using natural frequency shift of the microbeam. The good performance of the accelerometer is verified by using analytical simulation and FEA (Finite Element Analysis). Moreover, to achieve a most sensitive structure, the best dimension arrangement of 1:2 for the ratio of the microbeam to the proof mass is also realized.

Citation Download Citation

Deng-Huei Hwang, Yi-Chung Lo, and Kanping Chin "Design considerations of the biaxial frequency-shifted microaccelerometer", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448837

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