Design of an acoustic wave actuator using Lorentz force

Ping-Ting Liu; Yi-Ping Ho; Shih-Hsorng Shen; Shih-Tsang Tang; Shuenn-Tsong Young; Weileun Fang

doi:10.1117/12.448841

19 November 2001 Design of an acoustic wave actuator using Lorentz force

Ping-Ting Liu, Yi-Ping Ho, Shih-Hsorng Shen, Shih-Tsang Tang, Shuenn-Tsong Young, Weileun Fang

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448841
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

In this study, we developed a torsional micromachined receiver array to generate acoustic wave based on Lorentz force. The receiver array is constructed by many micro mirror components with which two pair of leads were laid around each mirror edge. In each component, a direct and an alternating driving signal were applied to each pair of leads, respectively. The mirror components will then rotate to an angle and oscillate upon the application of a specific magnetic field induced by Lorentz force. The alternating signal drives the mirror to oscillate and to generate acoustic waves of the same frequency as the alternating signal. The strength of the alternating signal and the amount of the mirror components determine the power density of the acoustic waves. The direct signal is applied on one of the paired leads that transacts with the magnetic field. Lorentz force then rotates the mirror component to a torsional angle that is proportional to the direct signal strength. Therefore, under a specific static magnetic field, driving the mirrors with different direct signal may focus the acoustic waves. With the focusing mechanism, the acoustic wave is capable of scanning in various depths, which could be reached by continuously changing the direct signal strengths. Additionally, applying the direct signals based on appropriate timing will produce strong wave by reconstructed interference, and the acoustic waves will be focused effectively. The acoustic waves then have much higher resolution and can be utilized similar to light waves.

Citation Download Citation

Ping-Ting Liu, Yi-Ping Ho, Shih-Hsorng Shen, Shih-Tsang Tang, Shuenn-Tsong Young, and Weileun Fang "Design of an acoustic wave actuator using Lorentz force", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448841

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Acoustics

Mirrors

Receivers

Lead

Magnetism

Scanning probe lithography

Micromirrors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years