Ms. Ping-Ting Liu Profile

Ping-Ting Liu

at National Yang-Ming Univ

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Proceedings Article | 19 November 2001 Paper

Design of an acoustic wave actuator using Lorentz force

Ping-Ting Liu, Yi-Ping Ho, Shih-Hsorng Shen, Shih-Tsang Tang, Shuenn-Tsong Young, Weileun Fang

Proceedings Volume 4593, (2001) https://doi.org/10.1117/12.448841

KEYWORDS: Acoustics, Mirrors, Receivers, Lead, Magnetism, Scanning probe lithography, Micromirrors, Silicon, Resistance, Microelectromechanical systems

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In this study, we developed a torsional micromachined receiver array to generate acoustic wave based on Lorentz force. The receiver array is constructed by many micro mirror components with which two pair of leads were laid around each mirror edge. In each component, a direct and an alternating driving signal were applied to each pair of leads, respectively. The mirror components will then rotate to an angle and oscillate upon the application of a specific magnetic field induced by Lorentz force. The alternating signal drives the mirror to oscillate and to generate acoustic waves of the same frequency as the alternating signal. The strength of the alternating signal and the amount of the mirror components determine the power density of the acoustic waves. The direct signal is applied on one of the paired leads that transacts with the magnetic field. Lorentz force then rotates the mirror component to a torsional angle that is proportional to the direct signal strength. Therefore, under a specific static magnetic field, driving the mirrors with different direct signal may focus the acoustic waves. With the focusing mechanism, the acoustic wave is capable of scanning in various depths, which could be reached by continuously changing the direct signal strengths. Additionally, applying the direct signals based on appropriate timing will produce strong wave by reconstructed interference, and the acoustic waves will be focused effectively. The acoustic waves then have much higher resolution and can be utilized similar to light waves.

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