Fabrication of photonic crystals in multilayer organic films

Janusz A. Murakowski; Dennis W. Prather

doi:10.1117/12.437272

24 July 2002 Fabrication of photonic crystals in multilayer organic films

Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.437272
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States

Abstract

We present a novel method for making 2D photonic crystal structures. The method relies on exposing a multilayer electron beam resist. The different layers exhibit different dissolution rates in the developer, which makes it possible to produce a perforated membrane released from the substrate if the resist closest to the substrate has a higher dissolution rate than the resist on the surface. The entire structure is created in a single development step. Various structures fabricated with this method are reported.

Citation Download Citation

Janusz A. Murakowski and Dennis W. Prather "Fabrication of photonic crystals in multilayer organic films", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.437272

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