Paper
5 August 2002 Two-color blocked-impurity-band detector arrays
Author Affiliations +
Abstract
Multicolor focal plane arrays are of interest for a variety of applications. We report on a method to create a multicolor detector array of high-performance arsenic-doped silicon Blocked-Impurity-Band (BIB) detectors by using diffractive microlenses. Advantage is taken of the strong chromatic aberration characteristic of diffractive lenses to direct light within a pixel to either a central detector or to second detector concentrically disposed around the first. A theoretical calculation of the efficacy of this approach for spectral separation is presented. Fabrication of diffractive microlenses on the backside (illuminated-side) of thinned specially-designed BIB detector arrays is described. Finally, early initial results and further development plans are discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Maryn G. Stapelbroek and Ernest W. Atkins "Two-color blocked-impurity-band detector arrays", Proc. SPIE 4721, Infrared Detectors and Focal Plane Arrays VII, (5 August 2002); https://doi.org/10.1117/12.478847
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Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Microlens

Staring arrays

Semiconducting wafers

Optical alignment

Detector arrays

Etching

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