Sensitivity, accuracy, and precision issues in opto-electronic holography based on fiber optics and high-spatial- and high-digitial-resolution cameras

Cosme Furlong; Jeffrey S. Yokum; Ryszard J. Pryputniewicz

doi:10.1117/12.472206

20 June 2002 Sensitivity, accuracy, and precision issues in opto-electronic holography based on fiber optics and high-spatial- and high-digitial-resolution cameras

Cosme Furlong, Jeffrey S. Yokum, Ryszard J. Pryputniewicz

Author Affiliations +

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472206
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Sensitivity, accuracy, and precision characteristics in quantitative optical metrology techniques, and specifically in optoelectronic holography based on fiber optics and high-spatial and high-digital resolution cameras, are discussed in this paper. It is shown that sensitivity, accuracy, and precision dependent on both, the effective determination of optical phase and the effective characterization of the illumination-observation conditions. Sensitivity, accuracy, and precision are investigated with the aid of National Institute of Standards and Technology (NIST) traceable gages, demonstrating the applicability of quantitative optical metrology techniques to satisfy constantly increasing needs for the study and development of emerging technologies.

Citation Download Citation

Cosme Furlong, Jeffrey S. Yokum, and Ryszard J. Pryputniewicz "Sensitivity, accuracy, and precision issues in opto-electronic holography based on fiber optics and high-spatial- and high-digitial-resolution cameras", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472206

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available