Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler

Peter J. de Groot; Xavier Colonna de Lega; David A. Grigg

doi:10.1117/12.473535

19 June 2002 Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler

Peter J. de Groot, Xavier Colonna de Lega, David A. Grigg

Author Affiliations +

Proceedings Volume 4778, Interferometry XI: Applications; (2002) https://doi.org/10.1117/12.473535
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

We describe techniques for measuring step heights between separated, nominally plane-parallel surface regions of a precision-engineered part. Our technique combines a broadband, 10-micron wavelength scanning interferometric profiler with a HeNe laser displacement gage. The infrared wavelength accommodates machined metal parts having a surface roughness in excess of what would be possible with a visible-wavelength interferometer. The combination of broadband interferometry, which removes fringe order ambiguity, with a laser displacement gage makes it possible to determine the relative heights of surfaces separated by several mm with a 2-σ uncertainty of 0.3 micron. We present the instrument theory, experimental implementation and results of instrument testing.

Citation Download Citation

Peter J. de Groot, Xavier Colonna de Lega, and David A. Grigg "Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473535

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