Dr. Xavier C. Colonna de Lega Profile

Dr. Xavier C. Colonna de Lega

Director Innovations Group at Zygo Corporation

SPIE Involvement:

Author

Publications (25)

SPIE Journal Paper | 18 October 2021 Open Access

Modeling of coherence scanning interferometry using classical Fourier optics

Peter de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, Richard Leach

OE, Vol. 60, Issue 10, 104106, (October 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.10.104106

KEYWORDS: 3D modeling, Interferometry, Fourier optics, Instrument modeling, Optical engineering, Light sources, 3D metrology, Signal detection, Imaging systems, Spatial frequencies

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 5 August 2021 Presentation + Paper

Fourier optics modelling of coherence scanning interferometers

Peter de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, Richard Leach

Proceedings Volume 11817, 118170M (2021) https://doi.org/10.1117/12.2595668

KEYWORDS: 3D modeling, Interferometry, Fourier optics, Instrument modeling, Objectives, Light sources, Microscopes, Diffraction, Spatial frequencies, Interferometers

Read Abstract +

Proceedings Article | 21 August 2020 Presentation + Paper

Fourier optics modelling of instrument response for interference microscopy

Peter de Groot, Xavier Colonna de Lega

Proceedings Volume 11490, 114900T (2020) https://doi.org/10.1117/12.2569391

KEYWORDS: Interferometers, Systems modeling, Fourier optics, Light sources, Phase shifts, Optical filters, Objectives, Microscopy, Imaging systems

Read Abstract +

Proceedings Article | 20 August 2020 Presentation

Precision optical metrology of injection molds for aspherical microlenses

Jack DiSciacca, Peter de Groot, Richard Pultar, Xavier Colonna de Lega

Proceedings Volume 11487, 1148714 (2020) https://doi.org/10.1117/12.2569823

KEYWORDS: Microlens, Optical metrology, Metrology, Chemical elements, Cameras, Optical fabrication, Aspheric lenses, Diamond turning, Optical alignment, Microscopy

Read Abstract +

Proceedings Article | 1 April 2020 Paper

Interferometric measurements of mold-plate assemblies designed for high-volume manufacturing of aspheric microlenses

Jack DiSciacca, Richard Pultar, Xavier Colonna de Lega, Peter de Groot

Proceedings Volume 11352, 113520M (2020) https://doi.org/10.1117/12.2556924

KEYWORDS: Metrology, Aspheric lenses, Lenses, Fizeau interferometers, Interferometry, Diamond turning, Calibration, Surface finishing, Optical testing, High volume manufacturing

Read Abstract +

Proceedings Article | 3 September 2019 Paper

Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Peter de Groot, Xavier Colonna de Lega, Rong Su, Richard Leach

Proceedings Volume 11102, 111020G (2019) https://doi.org/10.1117/12.2526654

KEYWORDS: Interferometry, Modulation transfer functions, Interferometers, Imaging systems, 3D modeling, Spatial frequencies, Diffraction, Reflectivity, Point spread functions, 3D metrology

Read Abstract +

Proceedings Article | 18 August 2014 Paper

Interferometric microscope with true color imaging

J. Beverage, X. Colonna de Lega, M. Fay

Proceedings Volume 9203, 92030S (2014) https://doi.org/10.1117/12.2063264

KEYWORDS: Sensors, Cameras, Metrology, Optical filters, Color imaging, Interferometry, Microscopes, Data acquisition, Light sources, Image resolution

Read Abstract +

Proceedings Article | 24 March 2009 Paper

Multi-purpose optical profiler for characterization of materials, film stacks, and for absolute topography measurement

X. Colonna de Lega, Martin Fay, Peter de Groot, Boris Kamenev, J. Ryan Kruse, Mitch Haller, Mark Davidson, Lena Miloslavsky, Duncan Mills

Proceedings Volume 7272, 72723Z (2009) https://doi.org/10.1117/12.814629

KEYWORDS: Metrology, Data modeling, Oxides, Microscopes, Reflectivity, Semiconducting wafers, Optical properties, 3D metrology, Polarization, Data storage

Read Abstract +

Proceedings Article | 11 August 2008 Paper

Transparent film profiling and analysis by interference microscopy

Peter de Groot, Xavier Colonna de Lega, Martin Fay

Proceedings Volume 7064, 70640I (2008) https://doi.org/10.1117/12.794936

KEYWORDS: 3D metrology, Microscopy, 3D modeling, Interferometry, Profiling, Optical properties, Thin films, Silicon, Interferometers, Multilayers

Read Abstract +

Proceedings Article | 25 April 2008 Paper

Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler

X. Colonna de Lega, Peter de Groot

Proceedings Volume 6995, 69950P (2008) https://doi.org/10.1117/12.782836

KEYWORDS: Microscopes, Silicon, Oxides, Optical properties, Polarization, Refractive index, Data modeling, Interferometry, Objectives, Silica

Read Abstract +

Proceedings Article | 10 September 2004 Paper

Signal modeling for modern interference microscopes

Peter de Groot, Xavier Colonna de Lega

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.546226

KEYWORDS: Spatial frequencies, Microscopes, Thin films, Cameras, Interferometry, Light sources, Fourier transforms, Superposition, Ferroelectric materials, Optical interferometry

Read Abstract +

Proceedings Article | 16 August 2004 Paper

Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

David Grigg, Eric Felkel, John Roth, Xavier Colonna de Lega, Leslie Deck, Peter de Groot

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.546211

KEYWORDS: Microelectromechanical systems, Microscopy, Microopto electromechanical systems, Metrology, Thin films, Interferometry, Ferroelectric materials, Microscopes, Optical microscopy, Defect detection

Read Abstract +

Proceedings Article | 2 August 2004 Paper

Aberration characterization using frequency domain analysis of low-coherence interferograms

Xavier Colonna de Lega

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.559843

KEYWORDS: Interferometers, Objectives, Microscopes, Spatial frequencies, Fourier transforms, Imaging systems, Chromatic aberrations, Optical design, Interferometry, Motion measurement

Read Abstract +

Proceedings Article | 2 August 2004 Paper

Surface profiling using a reference-scanning Mirau interference microscope

Xavier Colonna de Lega, David Grigg, Peter de Groot

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.559893

KEYWORDS: Objectives, Microscopes, Profiling, Beam splitters, Cameras, Mirrors, Signal processing, Interferometry, Interferometers, Light emitting diodes

Read Abstract +

SPIE Journal Paper | 1 May 2003

Valve cone measurement using white light interference microscopy in a spherical measurement geometry

Peter de Groot, Xavier Colonna de Lega

OE, Vol. 42, Issue 05, (May 2003) https://doi.org/10.1117/12.10.1117/1.1565350

KEYWORDS: Spherical lenses, Optical testing, Surface finishing, Tolerancing, Cameras, Wavefronts, Optical spheres, Data acquisition, Microscopy, Microscopes

Proceedings Article | 20 June 2002 Paper

Interferometer design for writing Bragg gratings in optical fibers

Peter de Groot, Xavier Colonna de Lega, Jay Dawson, Trevor MacDougall, Minfu Lu, John Troll

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472247

KEYWORDS: Mirrors, Fiber Bragg gratings, Ultraviolet radiation, Interferometers, Tolerancing, Optical fibers, Luminescence, Optical design, Modulation, Refractive index

Read Abstract +

Proceedings Article | 19 June 2002 Paper

Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler

Peter de Groot, Xavier Colonna de Lega, David Grigg

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473535

KEYWORDS: Interferometry, Laser interferometry, Profilometers, Infrared radiation, Surface roughness, Interferometers, Profiling, Mirrors, Helium neon lasers, Metals

Read Abstract +

SPIE Journal Paper | 1 January 2000

Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures

Peter de Groot, Xavier Colonna de Lega, Dave Stephenson

OE, Vol. 39, Issue 01, (January 2000) https://doi.org/10.1117/12.10.1117/1.602339

KEYWORDS: Interferometry, Interferometers, Diffraction gratings, Metrology, 3D metrology, Optical testing, Surface roughness, Grazing incidence, Surface finishing, Phase shifts

Proceedings Article | 26 October 1999 Paper

Wavelet processing of interferometric signals and fringe patterns

Michel Cherbuliez, Pierre Jacquot, Xavier Colonna de Lega

Proceedings Volume 3813, (1999) https://doi.org/10.1117/12.366825

KEYWORDS: Wavelets, Interferometry, Signal processing, Speckle, Wavelet transforms, Phase shift keying, Fringe analysis, Image processing, Signal analyzers, Holography

Read Abstract +

Proceedings Article | 29 December 1998 Paper

Characterization of a geometrically desensitized interferometer for flatness testing

Xavier Colonna de Lega, James Biegen, Dave Stephenson, Peter de Groot

Proceedings Volume 3520, (1998) https://doi.org/10.1117/12.334344

KEYWORDS: Diffraction gratings, Interferometers, Diffraction, Reflection, Optical design, Ray tracing, Objectives, Geometrical optics, Instrument modeling, Stray light

Read Abstract +

Proceedings Article | 29 December 1998 Paper

Coherence scanning in a geometrically desensitized interferometer

Leslie Deck, Peter de Groot, Xavier Colonna de Lega

Proceedings Volume 3520, (1998) https://doi.org/10.1117/12.334345

KEYWORDS: Interferometers, Speckle pattern, Speckle, Diffusers, Cameras, Imaging systems, Optical interferometry, Coherence (optics), Metrology, Interferometry

Read Abstract +

Proceedings Article | 6 July 1998 Paper

Adjustable coherence depth in a geometrically desensitized interferometer

Peter de Groot, Leslie Deck, Xavier Colonna de Lega

Proceedings Volume 3479, (1998) https://doi.org/10.1117/12.316446

KEYWORDS: Interferometers, Interferometry, Light, Light sources, Cameras, Glasses, Reflection, Grazing incidence, Superposition, Chlorine

Read Abstract +

Proceedings Article | 18 March 1998 Paper

Deformation analysis of a communication telescope structure under nonuniform heating using holographic interferometry

Pierre Jacquot, Mathias Lehmann, Xavier Colonna de Lega

Proceedings Volume 3293, (1998) https://doi.org/10.1117/12.303643

KEYWORDS: Telescopes, Space telescopes, Holographic interferometry, Cameras, Refractive index, Lamps, Infrared cameras, Holography, Phase shifts, Temperature metrology

Read Abstract +

Proceedings Article | 18 September 1996 Paper

Interferometric deformation measurement using object-induced dynamic phase-shifting

Xavier Colonna de Lega, Pierre Jacquot

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250742

KEYWORDS: Phase shifts, Interferometry, Holographic interferometry, Holography, Speckle, Speckle interferometry

Read Abstract +

Proceedings Article | 15 November 1994 Paper

Common-path holographic interferometer for flatness testing

Pierre Jacquot, Xavier Colonna de Lega, Pierre Boone

Proceedings Volume 2248, (1994) https://doi.org/10.1117/12.194311

KEYWORDS: Holograms, Holographic optical elements, Interferometers, Phase shifts, Fringe analysis, Reflection, Holographic interferometers, Spherical lenses, Diffraction, Bismuth

Read Abstract +

Showing 5 of 25 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years