Prof. Rong Su Profile

Prof. Rong Su

Senior Research Scientist at Shanghai Institute of Optics and Fine Mechanics

SPIE Involvement:

Conference Program Committee | Author

Area of Expertise:

Optical metrology , Interferometric techniques , Optical modelling , Instrument calibration , Optical coherence tomography , Signal and image processing

Websites:

Company Website | Personal Website

Profile Summary

Dr Rong Su is a senior research scientist at Shanghai Institute of Optics and Fine Mechanics. Prior to his current position, he worked at the National Physical Laboratory and the University of Nottingham in the UK. His research interests include theory of 3D imaging and light scattering, and modelling, calibration and development of high accuracy optical instruments for surface and dimensional metrology. He currently focuses on developing interferometric and holographic imaging techniques to measure freeform and complex surfaces; and virtual optical instruments. Dr Su has published 60+ peer-reviewed papers and two book chapters. He is a member of the editorial board of Light: Advanced Manufacturing and Nanomanufacturing and Metrology, a scientific committee member of the European Society of Precision Engineering and Nanotechnology, SPIE Photonics Europe and European Optical Society Annual Meeting, and a former Research Affiliate of CIRP.

Publications (20)

SPIE Journal Paper | 12 April 2024 Open Access

Open Access

Comparison of Fourier optics-based methods for modeling coherence scanning interferometry

Helia Hooshmand, Tobias Pahl, Peter de Groot, Peter Lehmann, Athanasios Pappas, Rong Su, Richard Leach, Samanta Piano

OE, Vol. 63, Issue 04, 044102, (April 2024) https://doi.org/10.1117/12.10.1117/1.OE.63.4.044102

KEYWORDS: 3D modeling, Optical surfaces, Instrument modeling, Modeling, Equipment, Light sources and illumination, Optical engineering, Interferometry, Imaging systems, 3D metrology

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Proceedings Article | 24 November 2023 Paper

Paper

Simulation analysis of thermally induced deformation on reticle for deep ultraviolet lithography

Yisha Cao, Yunjun Lu, Peng Feng, Rong Su, Xiangzhao Wang

Proceedings Volume 12935, 1293559 (2023) https://doi.org/10.1117/12.3008409

KEYWORDS: Reticles, Thermal deformation, Deformation, Light sources, Lithography, Optical gratings, Light sources and illumination, Deep ultraviolet, Integrating spheres, Glasses

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Proceedings Article | 10 August 2023 Presentation + Paper

Presentation + Paper

Comparison of approximate methods for modelling coherence scanning interferometry

Helia Hooshmand, Tobias Pahl, Peter de Groot, Peter Lehmann, Athanasios Pappas, Rong Su, Richard Leach, Samanta Piano

Proceedings Volume 12619, 126190R (2023) https://doi.org/10.1117/12.2673657

KEYWORDS: 3D modeling, Optical surfaces, Modeling, Equipment, Instrument modeling, Light sources and illumination, Interferometry, Imaging systems, Fourier transforms

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Proceedings Article | 15 December 2022 Paper

Paper

High precision and fast measurement techniques of structural defects for large laser optics

Shijie Liu, Kaizao Ni, Shenghao Wang, Weiwei Wang, Weixiang Yang, Lanqing Li, Yun bo Bai, Rong Su, Jianda Shao

Proceedings Volume 12478, 124783Y (2022) https://doi.org/10.1117/12.2654888

KEYWORDS: Light scattering, Laser scattering, Optics manufacturing, Scattering, Glasses, Crystals, Optical components, Image processing, Surface finishing, Polishing

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Proceedings Article | 15 December 2022 Paper

Paper

High precision surface form measurement of meter-scale optical flat

Yunbo Bai, Xiaoyue Qiao, Ying Sun, Shijie Liu, Rong Su, Qi Lu, Yue Sun, Yaxian Xiao

Proceedings Volume 12478, 124782T (2022) https://doi.org/10.1117/12.2654781

KEYWORDS: Interferometers, Optical testing, Mirrors, Precision measurement, Photovoltaics, Optical components, Ultrafast phenomena, Reflectivity, Calibration, Wavefronts

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Proceedings Article | 15 December 2022 Paper

Paper

High-precision surface form measurement of meter-scale optical flat

Yunbo Bai, Xiaoyue Qiao, Ying Sun, Shijie Liu, Rong Su, Qi Lu, Yue Sun, Yaxian Xiao

Proceedings Volume 12478, 1247808 (2022) https://doi.org/10.1117/12.2646846

KEYWORDS: Interferometers, Optical testing, Mirrors, Photovoltaics, Optical components, Ultrafast phenomena, Reflectivity, Calibration, Wavefronts, Reflection

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Proceedings Article | 27 March 2022 Paper

Paper

Theoretical analysis of retrace error in Fizeau interferometer for deformed optical flats

Xiangyu Wei, Rong Su, Feng Tang, Xiangzhao Wang

Proceedings Volume 12169, 12169AY (2022) https://doi.org/10.1117/12.2626352

KEYWORDS: Fizeau interferometers, Semiconducting wafers, Monochromatic aberrations, Error analysis, Silicon, Wafer-level optics, Zernike polynomials, Wavefronts, Ray tracing, Interferometers

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SPIE Journal Paper | 18 October 2021 Open Access

Open Access

Modeling of coherence scanning interferometry using classical Fourier optics

Peter de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, Richard Leach

OE, Vol. 60, Issue 10, 104106, (October 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.10.104106

KEYWORDS: 3D modeling, Interferometry, Fourier optics, Instrument modeling, Optical engineering, Light sources, 3D metrology, Signal detection, Imaging systems, Spatial frequencies

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Proceedings Article | 5 August 2021 Presentation + Paper

Presentation + Paper

Fourier optics modelling of coherence scanning interferometers

Peter de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, Richard Leach

Proceedings Volume 11817, 118170M (2021) https://doi.org/10.1117/12.2595668

KEYWORDS: 3D modeling, Interferometry, Fourier optics, Instrument modeling, Objectives, Light sources, Microscopes, Diffraction, Spatial frequencies, Interferometers

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Proceedings Article | 20 June 2021 Presentation

Presentation

Virtual coherence scanning interferometer for surface measurement

Rong Su, Richard Leach

Proceedings Volume 11782, 117820L (2021) https://doi.org/10.1117/12.2592255

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Proceedings Article | 20 June 2021 Presentation + Paper

Presentation + Paper

Evaluating and propagating uncertainty in digital fringe projection systems

George Gayton, Mohammad Isa, Rong Su, Richard Leach

Proceedings Volume 11782, 117821C (2021) https://doi.org/10.1117/12.2592426

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Proceedings Article | 7 April 2020 Presentation + Paper

Presentation + Paper

Cascaded machine learning model for reconstruction of surface topography from light scattering

Mingyu Liu, Nicola Senin, Rong Su, Richard Leach

Proceedings Volume 11352, 113520Q (2020) https://doi.org/10.1117/12.2555035

KEYWORDS: Machine learning, Light scattering, Scattering, Neural networks, Computer simulations

Read Abstract +

Light scattering methods are promising for in-process surface measurement. Many researchers have investigated light scattering methods for evaluating surface texture. Researchers working on scatterometry have developed methods to derive surface texture parameters by solving the inverse scattering problem. However, most of the research has been focused only on texture measurement or determination of critical dimensions where feature sizes are less than the wavelength of the light source. In this paper, we propose a new light scattering method to reconstruct the surface topography of grating patterns, using a cascaded machine learning model. The experimental scattering signal can be fed into the machine learning model as the input and the surface topography can be determined as the output. The training dataset, i.e. scattering signals of different surfaces, are generated through a validated rigorous surface scattering model based on a boundary element method (BEM). In this way, the machine learning model can be trained using a big data approach including tens of thousands of datasets, which represent most of the scenarios in real cases. The cascaded machine learning model is designed as a combined top-down, two-layer model implemented using neural networks. The first layer consists of a classification model designed to determine which type of structured surface is being measured, amongst a set of predefined design variants. The second layer contains a regression model, designed to determine the values of the design parameters defining the specific type of structured surface which has been identified, for example the nominal pitch and height of its periodic features. We have developed a prototype system and conducted experiments to verify the proposed method. Structured surfaces containing grating patterns were considered, and different types of gratings were analysed. The results were validated by comparison with measurements performed with atomic force microscopy.

Proceedings Article | 1 April 2020 Presentation + Paper

Presentation + Paper

Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit

Matthew Thomas, Rong Su, Peter de Groot, Richard Leach

Proceedings Volume 11352, 1135207 (2020) https://doi.org/10.1117/12.2554568

KEYWORDS: Interferometers, Surface quality testing, Diffraction gratings, Scattering, Modeling, Signal to noise ratio, Spatial frequencies, 3D metrology

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SPIE Journal Paper | 25 March 2020 Open Access

Open Access

Modeling of interference microscopy beyond the linear regime

Matthew Thomas, Rong Su, Nikolay Nikolaev, Jeremy Coupland, Richard Leach

OE, Vol. 59, Issue 03, 034110, (March 2020) https://doi.org/10.1117/12.10.1117/1.OE.59.3.034110

KEYWORDS: 3D modeling, Instrument modeling, Microscopy, Scattering, Optical engineering, Spatial frequencies, Objectives, Multiple scattering, Data modeling, Polarization

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Proceedings Article | 3 September 2019 Presentation + Paper

Presentation + Paper

High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy

Rong Su, Matthew Thomas, Mingyu Liu, Jeremy Coupland, Richard Leach

Proceedings Volume 11102, 1110205 (2019) https://doi.org/10.1117/12.2528911

KEYWORDS: 3D metrology, Spatial frequencies, Microscopy, Manufacturing, 3D modeling

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Proceedings Article | 3 September 2019 Paper

Paper

Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Peter de Groot, Xavier Colonna de Lega, Rong Su, Richard Leach

Proceedings Volume 11102, 111020G (2019) https://doi.org/10.1117/12.2526654

KEYWORDS: Interferometry, Modulation transfer functions, Interferometers, Imaging systems, 3D modeling, Spatial frequencies, Diffraction, Reflectivity, Point spread functions, 3D metrology

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Proceedings Article | 12 July 2019 Presentation + Paper

Presentation + Paper

Multimodal mid-infrared optical coherence tomography and spectroscopy for non-destructive testing and art diagnosis

Ivan Zorin, Jakob Kilgus, Rong Su, Bernhard Lendl, Markus Brandstetter, Bettina Heise

Proceedings Volume 11058, 110580N (2019) https://doi.org/10.1117/12.2528279

KEYWORDS: Optical coherence tomography, Spectroscopy, Mid-IR, Scattering, Near infrared, Infrared spectroscopy, Ceramics, Nondestructive evaluation, Supercontinuum sources

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Proceedings Article | 21 June 2019 Presentation + Paper

Presentation + Paper

Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method

Matthew Thomas, Rong Su, Nikolay Nikolaev, Jeremy Coupland, Richard Leach

Proceedings Volume 11057, 1105713 (2019) https://doi.org/10.1117/12.2526015

KEYWORDS: 3D modeling, Scattering, Interferometry, Multiple scattering, Modeling, Phase measurement, Instrument modeling, Systems modeling, Spatial frequencies

Read Abstract +

Coherence scanning interferometry (CSI) is a well-established technique for measuring surface topography based on the coherence envelope and phase of interference fringes. The most commonly used surface reconstruction methods, i.e. frequency domain analysis, the envelope detection method, and the correlogram correlation method, obtain the phase of the measured field for each pixel and, from this obtain the surface height, by assuming the two are directly proportional. For surfaces with minor deviations from a plane, it is straightforward to show that the scattered field’s phase is a linear function of surface height. An alternative approach known as the “foil model” gives more generally the scattered field as the result of a linear filtering process operating on a “foil” representation of the surface. This model assumes that the surface slowly varies on the optical scale and that there is no multiple scattering. However, for surfaces that are rough at the optical scale or have coherent features (e.g. vee-grooves), the effect of multiple scattering cannot be neglected and remains a problem for reconstruction methods. Linear reconstruction methods cannot provide accurate surface topographies for complex surfaces, since for such surfaces, the measurement process of CSI is fundamentally non-linear. To develop an advanced reconstruction method for CSI, an accurate model of the imaging process is required. In this paper, a boundary elements method is used as a rigorous scattering model to calculate the scattered field at a distant boundary. Then, the CSI signal is calculated by considering the image formation as back-propagation of the scattered field, combined with the reflected reference field. Through this approach, the optical response of a CSI system can be predicted rigorously for almost any arbitrary surface geometry. Future work will include a comprehensive experimental verification of this model, and development of the non-linear surface reconstruction algorithm.

Proceedings Article | 7 March 2019 Paper

Paper

All-optical difference engine for in-process defect inspection for roll-to-roll printed electronics

Xiaobing Feng, Rong Su, Tuomas Happonen, Jian Liu, Richard Leach

Proceedings Volume 11053, 1105308 (2019) https://doi.org/10.1117/12.2511140

KEYWORDS: Sensors, Inspection, Printing, Defect inspection, Electronics, Defect detection, Manufacturing, Spatial filters, Photodiodes, Optics manufacturing

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Proceedings Article | 26 June 2017 Paper

Paper

Tolerance on sphere radius for the calibration of the transfer function of coherence scanning interferometry

Rong Su, Jeremy Coupland, Yuhang Wang, Richard Leach

Proceedings Volume 10329, 103290L (2017) https://doi.org/10.1117/12.2272041

KEYWORDS: Analytical research, Spherical lenses, Calibration, Tolerancing, Interferometry, Metrology, Point spread functions, 3D modeling, Interferometers

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Showing 5 of 20 publications

Conference Committee Involvement (3)

Optics and Photonics for Advanced Dimensional Metrology III

9 April 2024 | Strasbourg, France

Optics and Photonics for Advanced Dimensional Metrology II

5 April 2022 | Strasbourg, France

Optics and Photonics for Advanced Dimensional Metrology

6 April 2020 | Online Only, France

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