Comparison of approximate methods for modelling coherence scanning interferometry

Helia Hooshmand; Tobias Pahl; Peter J. de Groot; Peter Lehmann; Athanasios Pappas; Rong Su; Richard Leach; Samanta Piano

doi:10.1117/12.2673657

10 August 2023 Comparison of approximate methods for modelling coherence scanning interferometry

Helia Hooshmand, Tobias Pahl, Peter J. de Groot, Peter Lehmann, Athanasios Pappas, Rong Su, Richard Leach, Samanta Piano

Author Affiliations +

Proceedings Volume 12619, Modeling Aspects in Optical Metrology IX; 126190R (2023) https://doi.org/10.1117/12.2673657
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modelled using approximate physics-based approaches with minimal computational effort. A critical aspect of CSI modelling is defining the transfer function for the imaging properties of the instrument in order to predict the interference fringes from which topography information is extracted. Approximate methods, for example, elementary Fourier optics, universal Fourier optics and foil models, use scalar diffraction theory and the imaging properties of the optical system to model CSI surface topography measurement. In this paper, the measured topographies of different surfaces, including various sinusoids, two posts and a step height, calculated using the three example methods are compared. The presented results illustrate the agreement between the three example models.

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Helia Hooshmand, Tobias Pahl, Peter J. de Groot, Peter Lehmann, Athanasios Pappas, Rong Su, Richard Leach, and Samanta Piano "Comparison of approximate methods for modelling coherence scanning interferometry", Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 126190R (10 August 2023); https://doi.org/10.1117/12.2673657

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