X-ray lenses fabricated by deep x-ray lithography

Derrick C. Mancini; Nicolaie A. Moldovan; Ralu Divan; Francesco DeCarlo; Judith Yaeger

doi:10.1117/12.451021

21 November 2002 X-ray lenses fabricated by deep x-ray lithography

Derrick C. Mancini, Nicolaie A. Moldovan, Ralu Divan, Francesco DeCarlo, Judith Yaeger

Proceedings Volume 4783, Design and Microfabrication of Novel X-Ray Optics; (2002) https://doi.org/10.1117/12.451021
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Refractive x-ray lenses have been fabricated using deep x-ray lithography. Lenses were produced directly in 1- to 6-mm-thick sheets of polymethylmethacrylate (PMMA) with as many as 100 cylindrical lenses along the optical axis. The fabrication process consists of exposing the PMMA sheets to high-energy synchrotron radiation through a mask of 50-micron-thick gold on silicon, and subsequent development in ketone. The lenses are suitable for use in synchrotron radiation from a bending magnet at the Advanced Photon Source in the energy range of 8-16 KeV. Results of measurements of focus quality, flux density gain, and scatter are presented and discussed with regard to the quality of lens material and fabrication method. Means for improving the performance of the lenses is discussed.

Citation Download Citation

Derrick C. Mancini, Nicolaie A. Moldovan, Ralu Divan, Francesco DeCarlo, and Judith Yaeger "X-ray lenses fabricated by deep x-ray lithography", Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.451021

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