Submicron focusing of high-energy x-rays with Ni refractive lenses

Anatoly A. Snigirev; Irina I. Snigireva; Marco Di Michiel; Veijo Honkimaki; Maxim V. Grigoriev; Vladimir P. Nazmov; Elena F. Reznikova; Jurgen Mohr; Volker Saile

doi:10.1117/12.564545

4 November 2004 Submicron focusing of high-energy x-rays with Ni refractive lenses

Anatoly A. Snigirev, Irina I. Snigireva, Marco Di Michiel, Veijo Honkimaki, Maxim V. Grigoriev, Vladimir P. Nazmov, Elena F. Reznikova, Jurgen Mohr, Volker Saile

Author Affiliations +

Proceedings Volume 5539, Design and Microfabrication of Novel X-Ray Optics II; (2004) https://doi.org/10.1117/12.564545
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We report the results on experimental study of optical properties of Ni refractive lenses made by deep X-ray lithography and LIGA techniques. One- and two-dimensional lenses were tested at the ESRF ID15 beamline using wide energy spectrum from 40 keV to 220 keV. The focusing properties in terms of focal length, size of the focal spot/line and gain were studied. Sub micrometer focusing was measured in the energy range from 40 to 150 keV. The measured lens parameters were compared with ray-tracing analysis.

Citation Download Citation

Anatoly A. Snigirev, Irina I. Snigireva, Marco Di Michiel, Veijo Honkimaki, Maxim V. Grigoriev, Vladimir P. Nazmov, Elena F. Reznikova, Jurgen Mohr, and Volker Saile "Submicron focusing of high-energy x-rays with Ni refractive lenses", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.564545

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